Interferometric testing of steep cylindrical surfaces with on-axis CGHs
A. G. Poleshchuka, R. K. Nasyrova, J.-M. Asfourb
a Institute of Automation and Electrometry, Russian Academy of Sciences, Novosibirsk, Russia
b Dioptic GmbH, Weinheim, Germany
We present a new approach for testing cylindrical optical surfaces using a Null-test. We suggest using a Computer Generated Hologram (CGH) in combination with a Transmission Sphere. It is shown that in such an optical layout the period of the diffractive structure is larger than in the case of a conventional scheme using a collimated beam. Therefore, this kind of hologram enables the test of cylinder surfaces with higher numerical apertures.
diffractive optical elements, computer-generated hologram (CGH), laser writing, methods for DOE fabrication, cylinder metrology surface testing.
|Siberian Branch of Russian Academy of Sciences
|Russian Foundation for Basic Research
|Parts of this work for developing a method for testing cylindrical surfaces with on-axis CGHs was supported by the Interdisciplinary Integration Project No. 112 of the Siberian Branch of the Russian Academy of Sciences. The experimental investigation of the CGHs was supported by the Russian Foundation for Basic Research (Grant No 14-29-07227).
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A. G. Poleshchuk, R. K. Nasyrov, J.-M. Asfour, “Interferometric testing of steep cylindrical surfaces with on-axis CGHs”, Computer Optics, 40:5 (2016), 625–528
Citation in format AMSBIB
\by A.~G.~Poleshchuk, R.~K.~Nasyrov, J.-M.~Asfour
\paper Interferometric testing of steep cylindrical surfaces with on-axis CGHs
\jour Computer Optics
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