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Computer Optics, 2016, Volume 40, Issue 6, Pages 818–829 (Mi co332)  

OPTO-IT

Methods for on-line testing of characteristics of diffractive and conformal optical elements during the manufacturing process

A. G. Poleshchuk, V. P. Korolkov, R. K. Nasyrov, V. N. Khomutov, A. S. Konchenko

Institute of Automation and Electrometry SB RAS, Novosibirsk, Russia

Abstract: Development of dedicated methods for nondestructive testing of microstructured optical elements is a prerequisite for the wide-scale manufacturing of diffractive, micro-optical and conformal elements. A variety of approaches to the characterization of diverse types of microstructured optical elements were developed at the laboratory of Diffractive Optics at IAE SB RAS. These methods are intended to test wavefront errors, etch depth and diffraction efficiency during and after the manufacturing of elements with binary and multi-level surface profile. The review of the developed techniques and measuring circuits given in the work takes into account specific features of the elements' parameters and application areas. Testing results for the manufactured elements are discussed.

Keywords: diffractive optical elements characterization, errors of wavefront, etch depth measurement, scanning mirror reflectometry, diffraction efficiency measurement.

Funding Agency Grant Number
Russian Foundation for Basic Research 14-29-07227-офи_м
Siberian Branch of Russian Academy of Sciences 43
112
The work was partially funded by the Russian Foundation for Basic Research (RFBR), OFI-M grant No. 14-29-07227 and Interdisciplinary integration projects No. 43 and 112 SB RAS.


DOI: https://doi.org/10.18287/2412-6179-2016-40-6-818-829

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Full text: http://www.computeroptics.smr.ru/.../400607.html
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Received: 01.09.2016
Accepted:11.12.2016

Citation: A. G. Poleshchuk, V. P. Korolkov, R. K. Nasyrov, V. N. Khomutov, A. S. Konchenko, “Methods for on-line testing of characteristics of diffractive and conformal optical elements during the manufacturing process”, Computer Optics, 40:6 (2016), 818–829

Citation in format AMSBIB
\Bibitem{PolKorNas16}
\by A.~G.~Poleshchuk, V.~P.~Korolkov, R.~K.~Nasyrov, V.~N.~Khomutov, A.~S.~Konchenko
\paper Methods for on-line testing of characteristics of diffractive and conformal optical elements during the manufacturing process
\jour Computer Optics
\yr 2016
\vol 40
\issue 6
\pages 818--829
\mathnet{http://mi.mathnet.ru/co332}
\crossref{https://doi.org/10.18287/2412-6179-2016-40-6-818-829}


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