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Computer Optics, 2017, Volume 41, Issue 6, Pages 820–830 (Mi co453)  

OPTO-IT

Error analysis in digital processing of the results of interferometric control of nano-scale local deviations of optical surfaces

D. G. Denisov

Bauman Moscow State Technical University, Moscow, Russia

Abstract: A dynamic interferometry method for controlling nano-scale local deviations of optical surfaces from a prescribed profile is developed, theoretically substantiated, and experimentally verified on the basis of an algorithm for calculating an objective function, defined as the spectral density of a one-dimensional correlation function. Theoretical and experimental approaches to determining the root-mean-square error when finding local deviations of the optical surfaces for the element diameters ranging from 100 mm to 1,000 mm are presented, while taking into account the non-excluded systematic and random error components in determining the objective function.

Keywords: optical control, interferometry, surface measurements, power spectral density, method errors, edge effect, the effect of "leakage" of frequency.

Funding Agency Grant Number
Ministry of Education and Science of the Russian Federation
Separate sections of the work were carried out under the scholarship of the President of the Russian Federation, awarded to young scientists and graduate students doing research in advanced areas of modernization of the Russian economy in 2013-2015.


DOI: https://doi.org/10.18287/2412-6179-2017-41-6-820-830

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Received: 18.07.2017
Accepted:07.11.2017

Citation: D. G. Denisov, “Error analysis in digital processing of the results of interferometric control of nano-scale local deviations of optical surfaces”, Computer Optics, 41:6 (2017), 820–830

Citation in format AMSBIB
\Bibitem{Den17}
\by D.~G.~Denisov
\paper Error analysis in digital processing of the results of interferometric control of nano-scale local deviations of optical surfaces
\jour Computer Optics
\yr 2017
\vol 41
\issue 6
\pages 820--830
\mathnet{http://mi.mathnet.ru/co453}
\crossref{https://doi.org/10.18287/2412-6179-2017-41-6-820-830}


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