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Dokl. Akad. Nauk SSSR, 1969, Volume 188, Number 3, Pages 556–559 (Mi dan34913)  

PHYSICS

The use of crystal amorphizatiori phenomenon in revealing the mechanism of cathode sputtering

Kh. Zommerfeldt, E. S. Mashkova, V. A. Molchanov

Lomonosov Moscow State University

Full text: PDF file (582 kB)
UDC: 537.534.9
Presented: Л. А. Арцимович
Received: 05.02.1969

Citation: Kh. Zommerfeldt, E. S. Mashkova, V. A. Molchanov, “The use of crystal amorphizatiori phenomenon in revealing the mechanism of cathode sputtering”, Dokl. Akad. Nauk SSSR, 188:3 (1969), 556–559

Citation in format AMSBIB
\Bibitem{ZomMasMol69}
\by Kh.~Zommerfeldt, E.~S.~Mashkova, V.~A.~Molchanov
\paper The use of crystal amorphizatiori phenomenon in revealing the mechanism of cathode sputtering
\jour Dokl. Akad. Nauk SSSR
\yr 1969
\vol 188
\issue 3
\pages 556--559
\mathnet{http://mi.mathnet.ru/dan34913}


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