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Eurasian Journal of Mathematical and Computer Applications, 2018, том 6, выпуск 4, страницы 38–47
(Mi ejmca124)
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Regularizing algorithms for the determination of thickness of deposited layers in optical coating production
T. F. Isaeva, I. V. Kochikovb, D. V. Lukyanenkoa, A. V. Tikhonravovb, A. G. Yagolaa a Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia
b Research Computing Center, Lomonosov Moscow State University, Moscow 119992, Russia
Аннотация:
Production of the modern advanced multi-layer optical coatings requires on-line monitoring of the growing layer thickness. We present regularizing algorithms for the continuous on-line determination of the deposited layer thickness that can be used in the coating production with broadband optical monitoring. These algorithms are based on minimization of the Tikhonov functional as well as on the allocation of the correctness set. Numerical experiments confirm the effectiveness of the proposed algorithms.
Ключевые слова:
inverse problems in optics, regularizing algorithm, thin films, broadband optical monitoring
Финансовая поддержка |
Номер гранта |
Российский научный фонд  |
16-11-10219 |
Работа поддержана Российским научным фондом, грант 16-11-10219. |
DOI:
https://doi.org/10.32523/2306-6172-2018-6-4-38-47
Полный текст:
PDF файл (6482 kB)
Реферативные базы данных:
Тип публикации:
Статья
MSC: 47J06, 78A48, 78A50
Язык публикации: английский
Образец цитирования:
T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Regularizing algorithms for the determination of thickness of deposited layers in optical coating production”, Eurasian Journal of Mathematical and Computer Applications, 6:4 (2018), 38–47
Цитирование в формате AMSBIB
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\paper Regularizing algorithms for the determination of thickness of deposited layers in optical coating production
\jour Eurasian Journal of Mathematical and Computer Applications
\yr 2018
\vol 6
\issue 4
\pages 38--47
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http://mi.mathnet.ru/ejmca124 http://mi.mathnet.ru/rus/ejmca/v6/i4/p38
Citing articles on Google Scholar:
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