This article is cited in 1 scientific paper (total in 1 paper)
Sputtering of metals at ion-electron irradiation
Yu. V. Martynenko, S. N. Korshunov, I. D. Skorlupkin
National Research Centre "Kurchatov Institute"
It has been found that, in contrast to the commonly accepted opinion, simultaneous irradiation by $15$-keV Ar$^+$ ions and $2.5$-keV electrons at temperatures above $0.5T_m$ ($T_m$ is the melting temperature) induces much larger sputtering of metallic copper, nickel, and steel than irradiation only by Ar$^+$ ions. The effect increases with the temperature. At $T= 0.7T_m$, the sputtering coefficients in the case of ion-electron irradiation are more than twice as large as the sputtering coefficients in the case of irradiation by Ar$^+$ ions. The experiments on the sublimation of copper show that the sublimation rate in the case of the heating of a sample by an electron beam is higher than that in the case of heating in an electric vacuum oven. The revealed effects are explained by the electron-induced excitation of adatoms (atoms stuck over the surface, which appear owing to ion bombardment). Excited adatoms have a smaller binding energy with the surface and are sputtered more easily.
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Journal of Experimental and Theoretical Physics Letters, 2013, 98:12, 853–857
Yu. V. Martynenko, S. N. Korshunov, I. D. Skorlupkin, “Sputtering of metals at ion-electron irradiation”, Pis'ma v Zh. Èksper. Teoret. Fiz., 98:12 (2013), 957–961; JETP Letters, 98:12 (2013), 853–857
Citation in format AMSBIB
\by Yu.~V.~Martynenko, S.~N.~Korshunov, I.~D.~Skorlupkin
\paper Sputtering of metals at ion-electron irradiation
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\jour JETP Letters
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S. N. Korshunov, Yu. V. Martynenko, N. E. Belova, I. D. Skorlupkin, J. Surf. Ingestig., 11:4 (2017), 807–813
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