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Pis'ma v Zh. Èksper. Teoret. Fiz., 2014, Volume 99, Issue 9, Pages 614–617 (Mi jetpl3731)  

This article is cited in 5 scientific papers (total in 5 papers)

CONDENSED MATTER

Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkinab, M. V. Rybinab, K. B. Samusevab, M. F. Limonovba, R. V. Kiyanc, B. N. Chichkovc, Yu. S. Kivsharad, P. A. Belova

a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg
c Laser Zentrum Hannover
d Nonlinear Physics Centre, Research School of Physical Sciences and Engineering, Australian National University, Canberra

Abstract: As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

DOI: https://doi.org/10.7868/S0370274X14090094

Full text: PDF file (609 kB)
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English version:
Journal of Experimental and Theoretical Physics Letters, 2014, 99:9, 531–534

Bibliographic databases:

Received: 01.04.2014

Citation: I. I. Shishkin, M. V. Rybin, K. B. Samusev, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu. S. Kivshar, P. A. Belov, “Fabrication of submicron structures by three-dimensional laser lithography”, Pis'ma v Zh. Èksper. Teoret. Fiz., 99:9 (2014), 614–617; JETP Letters, 99:9 (2014), 531–534

Citation in format AMSBIB
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\by I.~I.~Shishkin, M.~V.~Rybin, K.~B.~Samusev, M.~F.~Limonov, R.~V.~Kiyan, B.~N.~Chichkov, Yu.~S.~Kivshar, P.~A.~Belov
\paper Fabrication of submicron structures by three-dimensional laser lithography
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2014
\vol 99
\issue 9
\pages 614--617
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\crossref{https://doi.org/10.7868/S0370274X14090094}
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\vol 99
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\crossref{https://doi.org/10.1134/S0021364014090112}
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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. Rybin M.V., Shishkin I.I., Samusev K.B., Belov P.A., Kivshar Yu.S., Kiyan R.V., Chichkov B.N., Limonov M.F., Crystals, 5:1 (2015), 61–73  crossref  isi  elib  scopus
    2. Samusev K.B., Rybin M.V., Samusev A.K., Limonov M.F., Phys. Solid State, 57:12 (2015), 2494–2501  crossref  adsnasa  isi  elib  scopus
    3. Samusev K.B., Rybin M.V., Lukashenko S.Yu., Belov P.A., Limonov M.F., Phys. Solid State, 58:7 (2016), 1412–1419  crossref  isi  elib  scopus
    4. Shishkin I., Baranov D., Slobozhanyuk A., Filonov D., Lukashenko S., Samusev A., Belov P., Sci Rep, 6 (2016), 35516  crossref  isi  elib  scopus
    5. A. V. Ivanov, A. A. Kozlov, A. N. Koreshkova, S. D. Abdullaev, I. A. Fedorova, Mosc. Univ. Chem. Bull., 72:1 (2017), 19–23  crossref  mathscinet  isi  scopus
  •       Pis'ma v Zhurnal ksperimental'noi i Teoreticheskoi Fiziki
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