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Pis'ma v Zh. Èksper. Teoret. Fiz., 2017, Volume 106, Issue 8, Pages 496–501 (Mi jetpl5397)  

CONDENSED MATTER

X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals

D. M. Zhigunova, I. A. Kamenskikha, A. M. Lebedevb, R. G. Chumakovb, Yu. A. Logacheva, S. N. Yakuninb, P. K. Kashkarovba

a Faculty of Physics, Moscow State University, Moscow, Russia
b National Research Center Kurchatov Institute, Moscow, Russia

Abstract: The structural properties and features of the chemical composition of SiO$_x$N$_y$/SiO$_2$, SiO$_x$N$_y$/Si$_3$N$_4$, and SiN$_x$/Si$_3$N$_4$ multilayer thin films with ultrathin (1-1.5 nm) barrier SiO$_2$ or Si$_3$N$_4$ layers are studied. The films have been prepared by plasma chemical vapor deposition and have been annealed at a temperature of 1150$^\circ$ C for the formation of silicon nanocrystals in the SiO$_x$N$_y$ or SiN$_x$ silicon-rich layers with a nominal thickness of 5 nm. The period of superlattices in the studied samples has been estimated by X-ray reflectivity. The phase composition of superlattices has been studied by X-ray electron spectroscopy using the decomposition of photoelectron spectra of the Si 2$p$, N 1$s$, and O 1$s$ levels into components corresponding to different charge states of atoms.

Funding Agency Grant Number
Ministry of Education and Science of the Russian Federation RFMEFI61614X0006


DOI: https://doi.org/10.7868/S0370274X17200073

Full text: PDF file (671 kB)
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English version:
Journal of Experimental and Theoretical Physics Letters, 2017, 106:8, 517–521

Bibliographic databases:

Document Type: Article
Received: 07.09.2017
Revised: 21.09.2017

Citation: D. M. Zhigunov, I. A. Kamenskikh, A. M. Lebedev, R. G. Chumakov, Yu. A. Logachev, S. N. Yakunin, P. K. Kashkarov, “X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals”, Pis'ma v Zh. Èksper. Teoret. Fiz., 106:8 (2017), 496–501; JETP Letters, 106:8 (2017), 517–521

Citation in format AMSBIB
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\paper X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2017
\vol 106
\issue 8
\pages 496--501
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\crossref{https://doi.org/10.7868/S0370274X17200073}
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\jour JETP Letters
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  • Письма в Журнал экспериментальной и теоретической физики Pis'ma v Zhurnal Иksperimental'noi i Teoreticheskoi Fiziki
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