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Pis'ma v Zh. Èksper. Teoret. Fiz., 2019, Volume 110, Issue 11, Pages 759–764 (Mi jetpl6064)  

MISCELLANEOUS

Optical and structural phenomena at multipulse interference femtosecond laser fabrication of metasurfaces on a thin film of amorphous silicon

S. I. Kudryashovab, P. A. Danilovba, A. P. Porfirevcd, A. A. Rudenkoa, N. N. Melnika, A. A. Kuchmizhakbe, O. B. Vitrikeb, A. A. Ionina

a Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 119991 Russia
b Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, Vladivostok, 690041 Russia
c Institute of Image Processing Systems, Federal Research Center Crystallography and Photonics, Russian Academy of Sciences, Samara, 443001 Russia
d Korolev State Aerospace University, Samara, 443086 Russia
e Far Eastern Federal University, Vladivostok, 690041 Russia

Abstract: The formation of hexagonal microarrays of nanoholes (metasurfaces) in a 50-nm hydrogenated amorphous silicon film by means of three-beam interference of femtosecond laser pulses of the visible range (wavelength 515 nm) is studied experimentally with various exposures of the film. Characterization of arrays by scanning electron and optical microscopy, as well as optical transmission and reflection microspectroscopy, shows that an increase in the number of fixed energy laser pulses leads to a gradual evaporative formation of nanoholes in the film and, overall, the metasurface. Raman microspectroscopy reveals a simultaneous growth of the volume content of the crystal phase.

Funding Agency Grant Number
Russian Science Foundation 16-12-10165
This work was supported by the Russian Science Foundation (project no.16-12-10165).


DOI: https://doi.org/10.1134/S0370274X19230103

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English version:
Journal of Experimental and Theoretical Physics Letters, 2019, 110:11, 755–759

Bibliographic databases:

Received: 23.10.2019
Revised: 06.11.2019
Accepted:06.11.2019

Citation: S. I. Kudryashov, P. A. Danilov, A. P. Porfirev, A. A. Rudenko, N. N. Melnik, A. A. Kuchmizhak, O. B. Vitrik, A. A. Ionin, “Optical and structural phenomena at multipulse interference femtosecond laser fabrication of metasurfaces on a thin film of amorphous silicon”, Pis'ma v Zh. Èksper. Teoret. Fiz., 110:11 (2019), 759–764; JETP Letters, 110:11 (2019), 755–759

Citation in format AMSBIB
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\by S.~I.~Kudryashov, P.~A.~Danilov, A.~P.~Porfirev, A.~A.~Rudenko, N.~N.~Melnik, A.~A.~Kuchmizhak, O.~B.~Vitrik, A.~A.~Ionin
\paper Optical and structural phenomena at multipulse interference femtosecond laser fabrication of metasurfaces on a thin film of amorphous silicon
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2019
\vol 110
\issue 11
\pages 759--764
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\crossref{https://doi.org/10.1134/S0370274X19230103}
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\jour JETP Letters
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