This article is cited in 1 scientific paper (total in 1 paper)
Technological features influence on magnetic sensitivity of sensor based on ferromagnetic structures
Nikolay A. Djuzhev, Aleksey S. Iurov, Nikita S. Mazurkin, Maksim Y. Chinenkov
National Research University of Electronic Technology (MIET),
Shokina, 1, Moscow, Zelenograd, 124498, Russia
Main urgent problems of the magnetic devices and primary converters development based on the magnetoresistive structures are the sensitivity improvement and thermal stability. The sensitivity was determined as the ratio of the magnitude of the output signal (imbalance voltage of the bridge under the action of magnetic field) to the magnetic field magnitude on the linear range of transfer characteristic. The investigated structures had a wide range of sensitivity values from 3.0 (mV/V)/(kA/m) to 9.4 (mV/V)/(kA/m), in the bias field value of 1 kA/m. It is established what the main influence on the sensitivity of the sensor has a width of permalloy strips. The distance between the barber pole has a substantially smaller effect.
magnetoresistive sensor, MEMS, magnetoresistance, magnetoresistor.
|Ministry of Education and Science of the Russian Federation
|This work was supported by Ministry of Education and Science of the Russian Federation
grant no. 14.578.21.0001 (RFMEFI57814X0001). and conducted using the equipment of Multiaccess
center “Microsystem technics and electronics component base” MIET.
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Received in revised form: 10.10.2016
Nikolay A. Djuzhev, Aleksey S. Iurov, Nikita S. Mazurkin, Maksim Y. Chinenkov, “Technological features influence on magnetic sensitivity of sensor based on ferromagnetic structures”, J. Sib. Fed. Univ. Math. Phys., 10:2 (2017), 181–185
Citation in format AMSBIB
\by Nikolay~A.~Djuzhev, Aleksey~S.~Iurov, Nikita~S.~Mazurkin, Maksim~Y.~Chinenkov
\paper Technological features influence on magnetic sensitivity of sensor based on ferromagnetic structures
\jour J. Sib. Fed. Univ. Math. Phys.
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