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Kvantovaya Elektronika, 2005, Volume 35, Number 9, Pages 799–804 (Mi qe10349)  

This article is cited in 3 scientific papers (total in 3 papers)

Lasers

Influence of excitation parameters and active medium on the efficiency of an electric-discharge excimer ArF laser

A. M. Razheva, A. I. Shchedrinb, A. G. Kalyuzhnayab, A. A. Zhupikova

a Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk
b Institute of Physics, National Academy of Sciences of Ukraine, Kiev

Abstract: The kinetic model of processes occurring in the plasma of an electric-discharge 193-nm excimer ArF laser operating on mixtures of He and Ne buffer gases is developed. The influence of excitation and active medium parameters on the lasing energy and total efficiency of the electric-discharge excimer ArF laser is studied theoretically and experimentally. It is shown that a specific pump power of ~4.5–5.0 MW cm-3 is required for attaining the maximum lasing energy for the highest efficiency of an ArF laser operating on a He–Ar–F2 mixture. For the first time, the pulse energy of 1.3 J at an efficiency of 2.0% is attained for an ArF laser with a specific pump power of 5.0 MW cm-3 using mixtures with helium as a buffer gas.

Full text: PDF file (155 kB)

English version:
Quantum Electronics, 2005, 35:9, 799–804

Bibliographic databases:

PACS: 42.55.Lt, 42.60.Lh
Received: 08.06.2005

Citation: A. M. Razhev, A. I. Shchedrin, A. G. Kalyuzhnaya, A. A. Zhupikov, “Influence of excitation parameters and active medium on the efficiency of an electric-discharge excimer ArF laser”, Kvantovaya Elektronika, 35:9 (2005), 799–804 [Quantum Electron., 35:9 (2005), 799–804]

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  • http://mi.mathnet.ru/eng/qe10349
  • http://mi.mathnet.ru/eng/qe/v35/i9/p799

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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. A M Razhev, A A Zhupikov, QUANTUM ELECTRON, 38:11 (2008), 1005  mathnet  crossref  adsnasa  isi  elib  scopus
    2. Wang Qian, Zhao Jiang-Shan, Luo Shi-Wen, Zuo Du-Luo, Zhou Yi, Acta Phys. Sin., 65:21 (2016), 214205  crossref  isi  scopus
    3. Wang Qian, Zhao Jiang-Shan, Fan Yuan-Yuan, Guo Xin, Zhou Yi, Acta Phys. Sin., 69:17 (2020), 174207  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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