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Kvantovaya Elektronika, 2009, Volume 39, Number 4, Pages 385–387 (Mi qe13909)  

This article is cited in 1 scientific paper (total in 1 paper)

Laser technologies

Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F2- lasers

T. T. Basieva, A. Ya. Karasika, V. V. Osikob, A. G. Papashvilia, D. S. Chunaeva, A. V. Gavrilovc, M. N. Ershkovc, S. N. Smetaninc, S. A. Solokhinc, A. V. Fedinc, V. N. Kolokol'tsevd, V. M. Lazorenkod, V. I. Tovtind

a Laser Materials and Technology Research Center, Prokhorov General Physics Institute, RAS, Moscow
b A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
c Kovrov State Technological Academy
d A. Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, Moscow

Abstract: The picosecond (based on Nd:YLF — LiF:F2- crystals) and nanosecond (Nd:YAG — LiF:F2-) laser technologies are proposed for perforating closely spaced micron holes in aluminium foil for microelectronics, medicine, and biology. Two-dimensional matrices of holes with diameters of 2 — 20 μm spaced from each other by 8 — 30 μm are obtained in 20-μm-thick aluminium foil. It is shown that it is possible to increase the hole density and decrease their diameter by controlling the laser irradiation regime. A sample of perforated aluminium foil is obtained with the total area of micron holes comprising 30% of the entire surface.

Full text: PDF file (120 kB)

English version:
Quantum Electronics, 2009, 39:4, 385–387

Bibliographic databases:

PACS: 42.62.Cf, 42.55.Rz
Received: 02.06.2008
Revised: 25.11.2008

Citation: T. T. Basiev, A. Ya. Karasik, V. V. Osiko, A. G. Papashvili, D. S. Chunaev, A. V. Gavrilov, M. N. Ershkov, S. N. Smetanin, S. A. Solokhin, A. V. Fedin, V. N. Kolokol'tsev, V. M. Lazorenko, V. I. Tovtin, “Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F2- lasers”, Kvantovaya Elektronika, 39:4 (2009), 385–387 [Quantum Electron., 39:4 (2009), 385–387]

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  • http://mi.mathnet.ru/eng/qe/v39/i4/p385

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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. Pogoda A.P. Sergeev A.A. Fedin A.V. Ivanov A.S. Nikonorov N.V., Tech. Phys. Lett., 43:4 (2017), 402–404  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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