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Kvantovaya Elektronika, 2009, Volume 39, Number 10, Pages 967–972 (Mi qe14028)  

This article is cited in 5 scientific papers (total in 5 papers)

Laser applications and other topics in quantum electronics

Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits

V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov

State Research Center of Russian Federation "Troitsk Institute for Innovation and Fusion Research"

Abstract: The development of high-power discharge sources emitting in the 13.5 ± 0.135-nm spectral band is of current interest because they are promising for applications in industrial EUV (extreme ultraviolet) lithography for manufacturing integrated circuits according to technological precision standards of 22 nm and smaller. The parameters of EUV sources based on a laser-induced discharge in tin vapours between rotating disc electrodes are investigated. The properties of the discharge initiation by laser radiation at different wavelengths are established and the laser pulse parameters providing the maximum energy characteristics of the EUV source are determined. The EUV source developed in the study emits an average power of 276 W in the 13.5 ± 0.135-nm spectral band on conversion to the solid angle 2π sr in the stationary regime at a pulse repetition rate of 3000 Hz.

Full text: PDF file (313 kB)

English version:
Quantum Electronics, 2009, 39:10, 967–972

Bibliographic databases:

PACS: 42.72.Bj, 52.80.Yr, 85.40.Hp
Received: 17.12.2008
Revised: 15.04.2009

Citation: V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits”, Kvantovaya Elektronika, 39:10 (2009), 967–972 [Quantum Electron., 39:10 (2009), 967–972]

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  • http://mi.mathnet.ru/eng/qe14028
  • http://mi.mathnet.ru/eng/qe/v39/i10/p967

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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokofiev, O. B. Khristoforov, Plasma Phys Rep, 36:3 (2010), 216  crossref  adsnasa  isi  elib  scopus
    2. Quantum Electron., 40:8 (2010), 720–726  mathnet  crossref  adsnasa  isi  elib
    3. Sublemontier O., Rosset-Kos M., Ceccotti T., Hergott J.-F., Auguste T., Normand D., Schmidt M., Beaumont F., Farcage D., Cheymol G., Le Caro J.-M., Cormont Ph., Mauchien P., Thro P.-Y., Skrzypczak J., Muller S., Marquis E., Barthod B., Gaurand I., Davenet M., Bernard R., J. Laser Micro Nanoeng., 6:2 (2011), 113–118  crossref  isi  elib  scopus
    4. Quantum Electron., 44:11 (2014), 1077–1082  mathnet  crossref  isi  elib
    5. Quantum Electron., 45:8 (2015), 691–696  mathnet  crossref  isi  elib
  • Квантовая электроника Quantum Electronics
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