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Kvantovaya Elektronika, 2010, Volume 40, Number 8, Pages 720–726 (Mi qe14369)  

This article is cited in 8 scientific papers (total in 8 papers)

Interaction of laser radiation with matter. Laser plasma

High-power EUV (13.5 nm) light source

V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, S. V. Zakharov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov

State Research Center of Russian Federation "Troitsk Institute for Innovation and Fusion Research"

Abstract: Characteristics of a discharge-produced plasma (DPP) light source in the spectral band 13.5±0.135 nm, developed for Extreme Ultra Violet (EUV) lithography, are presented. EUV light is generated by DPP in tin vapour formed between rotating disk electrodes. The discharge is ignited by a focused laser beam. The EUV power 1000 W/(2π sr) in the spectral band 13.5±0.135 nm was achieved with input power about of ~63 kW to the plasma at a pulse repetition rate ~7 kHz. The results of numerical simulation are compared with the experimental data.

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English version:
Quantum Electronics, 2010, 40:8, 720–726

Bibliographic databases:

PACS: 42.72.Bj, 52.80.-s, 52.50.Jm
Received: 26.05.2010

Citation: V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, S. V. Zakharov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “High-power EUV (13.5 nm) light source”, Kvantovaya Elektronika, 40:8 (2010), 720–726 [Quantum Electron., 40:8 (2010), 720–726]

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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. L.S. Chan, D. Tan, S. Saboohi, S.L. Yap, C.S. Wong, Vacuum, 2013  crossref  isi  elib  scopus
    2. Quantum Electron., 44:11 (2014), 1077–1082  mathnet  crossref  isi  elib
    3. Quantum Electron., 45:8 (2015), 691–696  mathnet  crossref  isi  elib
    4. Yakushev O.F., Vinokhodov A.Yu., Koshelev K.N., Krivtsun V.N., Instrum. Exp. Tech., 58:6 (2015), 820–824  crossref  mathscinet  isi  elib  scopus
    5. Quantum Electron., 46:1 (2016), 81–87  mathnet  crossref  isi  elib
    6. Beyene G.A., Tobin I., Juschkin L., Hayden P., O'Sullivan G., Sokell E., Zakharov V.S., Zakharov S.V., O'Reilly F., J. Phys. D-Appl. Phys., 49:22 (2016), 225201  crossref  isi  elib  scopus
    7. Zakharov V.S., J. Phys. D-Appl. Phys., 50:3 (2017), 035202  crossref  isi  scopus
    8. V. S. Zakharov, Preprinty IPM im. M. V. Keldysha, 2018, 148, 18 pp.  mathnet  crossref  elib
  • Квантовая электроника Quantum Electronics
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