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Kvantovaya Elektronika, 2011, Volume 41, Number 9, Pages 829–834 (Mi qe14530)  

This article is cited in 17 scientific papers (total in 17 papers)

Interaction of laser radiation with matter

Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses

A. A. Ionina, S. I. Kudryashova, S. V. Makarova, L. V. Selezneva, D. V. Sinitsyna, E. V. Golosovb, O. A. Golosovab, Yu. R. Kolobovb, A. E. Ligachevc

a P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow
b Belgorod State University
c A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

Abstract: Quasi-periodic nano- and microstructures have been formed on silicon surface using IR ( λ ≈ 744 nm) and UV ( λ ≈ 248 nm) femtosecond laser pulses. The influence of the incident energy density and the number of pulses on the structured surface topology has been investigated. The silicon nanostructurisation thresholds have been determined for the above-mentioned wavelengths. Modulation of the surface relief at the doubled spatial frequency is revealed and explained qualitatively. The periods of the nanostructures formed on the silicon surface under IR and UV femtosecond laser pulses are comparatively analysed and discussed.

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English version:
Quantum Electronics, 2011, 41:9, 829–834

Bibliographic databases:

PACS: 81.07.-b, 81.16.-c, 42.65.Re
Received: 30.12.2010
Revised: 29.06.2011

Citation: A. A. Ionin, S. I. Kudryashov, S. V. Makarov, L. V. Seleznev, D. V. Sinitsyn, E. V. Golosov, O. A. Golosova, Yu. R. Kolobov, A. E. Ligachev, “Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses”, Kvantovaya Elektronika, 41:9 (2011), 829–834 [Quantum Electron., 41:9 (2011), 829–834]

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    1. A. A. Ionin, Phys. Usp., 55:7 (2012), 721–728  mathnet  crossref  crossref  isi  elib  elib
    2. Haifeng Yang, Longpeng Zhou, Haidong He, Jiguo Qian, Jingbin Hao, Hua Zhu, J Russ Laser Res, 2012  crossref  isi  scopus
    3. Quantum Electron., 43:4 (2013), 304–307  mathnet  crossref  adsnasa  isi  elib
    4. A.A. Ionin, S.I. Kudryashov, S.V. Makarov, A.A. Rudenko, L.V. Seleznev, Applied Surface Science, 2013  crossref  isi  elib  scopus
    5. A. Brantov, V. Yu. Bychenkov, Contrib. Plasma Phys, 53:10 (2013), 731  crossref  adsnasa  isi  elib  scopus
    6. A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, L. V. Seleznev, Appl. Phys. A, 2013  crossref  isi  scopus
    7. HAIFENG YANG, TIANCHI CHEN, JIGUO QIAN, JING HAN, HAIDONG HE, Bull Mater Sci, 2015  crossref  isi  scopus
    8. P. A. Danilov, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, J. Exp. Theor. Phys, 120:6 (2015), 946  crossref  adsnasa  isi  elib  scopus
    9. Quantum Electron., 47:6 (2017), 503–508  mathnet  crossref  isi  elib
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    11. Talbi A., Kaya-Boussougou S., Sauldubois A., Stolz A., Boulmer-Leborgne Ch., Semmar N., Appl. Phys. A-Mater. Sci. Process., 123:7 (2017), 463  crossref  isi  scopus
    12. Gilicze B., Moczok M., Madarasz D., Juhasz N., Racsko B., Nanai L., Tim15-16 Physics Conference, AIP Conference Proceedings, 1796, eds. Vizman D., Popescu A., Amer Inst Physics, 2017, UNSP 030001  crossref  isi  scopus
    13. Halstuch A., Westreich O., Sicron N., Ishaaya A.A., Opt. Lasers Eng., 109 (2018), 68–72  crossref  isi  scopus
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    15. Kolobov Yu.R., Russ. Phys. J., 61:4 (2018), 611–623  crossref  isi  scopus
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    17. Yang L., Wei J., Ma Zh., Song P., Ma J., Zhao Y., Huang Zh., Zhang M., Yang F., Wang X., Nanomaterials, 9:12 (2019), 1789  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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