Kvantovaya Elektronika
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Impact factor
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS



Kvantovaya Elektronika:
Year:
Volume:
Issue:
Page:
Find






Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register


Kvantovaya Elektronika, 2013, Volume 43, Number 12, Pages 1170–1174 (Mi qe15194)  

This article is cited in 2 scientific papers (total in 2 papers)

Laser deposition of thin films

A simple solution to the problem of effective utilisation of the target material for pulsed laser deposition of thin films

A. S. Kuzanyana, A. A. Kuzanyana, V. A. Petrosyana, S. Kh. Pilosyanb, A. Z. Grasyukb

a Institute for Physical Research, National Academy of Sciences of Armenia, Ashtarak
b P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow

Abstract: The factors determining the efficiency of the target material utilisation for pulsed laser deposition of films are considered. The target volume is calculated, which is evaporated in the ablation process by the focused laser radiation having a rectangular form. The new device is suggested and developed for obtaining thin films by the method of laser deposition, which is specific in the employment of a simple optical system mounted outside a deposition chamber that comprises two lenses and the diaphragm and focuses the laser beam onto a target in the form of a sector-like spot. Thin films of CuO and YBaCuO were deposited with this device. Several deposition cycles revealed that the target material is consumed uniformly from the entire surface of the target. A maximal spread of the target thickness was not greater than ±2% both prior to deposition and after it. The device designed provides a high coefficient of the target material utilisation efficiency.

Keywords: pulsed laser deposition, laser beam, focal spot, target.

Full text: PDF file (766 kB)
References: PDF file   HTML file

English version:
Quantum Electronics, 2013, 43:12, 1170–1174

Bibliographic databases:

PACS: 81.15.Fq
Received: 31.03.2013
Revised: 01.11.2013

Citation: A. S. Kuzanyan, A. A. Kuzanyan, V. A. Petrosyan, S. Kh. Pilosyan, A. Z. Grasyuk, “A simple solution to the problem of effective utilisation of the target material for pulsed laser deposition of thin films”, Kvantovaya Elektronika, 43:12 (2013), 1170–1174 [Quantum Electron., 43:12 (2013), 1170–1174]

Linking options:
  • http://mi.mathnet.ru/eng/qe15194
  • http://mi.mathnet.ru/eng/qe/v43/i12/p1170

    SHARE: VKontakte.ru FaceBook Twitter Mail.ru Livejournal Memori.ru


    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. Kuzanyan A.S. Kuzanyan A.A., Applications of Laser Ablation - Thin Film Deposition, Nanomaterial Synthesis and Surface Modification, ed. Yang D., Intech Europe, 2016, 149–173  crossref  isi
    2. Conde J., Kuo C., Silveyra J., IEEE Latin Am. Trans., 18:2 (2020), 438–445  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
    Number of views:
    This page:175
    Full text:68
    References:25
    First page:13

     
    Contact us:
     Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2021