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Kvantovaya Elektronika, 2013, Volume 43, Number 12, Pages 1149–1153 (Mi qe15272)  

This article is cited in 10 scientific papers (total in 10 papers)

Fiber and integrated optics

Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation

V. I. Sokolov, N. V. Marusin, V. Ya. Panchenko, A. G. Savelyev*, V. N. Seminogov, E. V. Khaidukov

Institute on Laser and Information Technologies, Russian Academy of Scienses, Shatura, Moscow Region

Abstract: We propose a method for measuring simultaneously the refractive index nf, extinction coefficient mf and thickness Hf of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of nf, mf and Hf are found by minimising the functional φ = [N-1ΣNi=1(Rexpi) – Rthri))2]1/2, where Rexpi) and Rthri) are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence θi. The errors in determining nf, mf and Hf by this method are ±2 × 10-4, ±1 × 10-3 and ±0.5%, respectively.

Keywords: thin films, method of excitation of waveguide modes.
* Author to whom correspondence should be addressed

Full text: PDF file (625 kB)
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English version:
Quantum Electronics, 2013, 43:12, 1149–1153

Bibliographic databases:

PACS: 42.82.-m, 78.66.-w
Received: 08.07.2013

Citation: V. I. Sokolov, N. V. Marusin, V. Ya. Panchenko, A. G. Savelyev, V. N. Seminogov, E. V. Khaidukov, “Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation”, Kvantovaya Elektronika, 43:12 (2013), 1149–1153 [Quantum Electron., 43:12 (2013), 1149–1153]

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  • http://mi.mathnet.ru/eng/qe/v43/i12/p1149

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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. Quantum Electron., 44:11 (2014), 1048–1054  mathnet  crossref  isi  elib
    2. Vladimir Serdyuk, Anton Rudnitsky, J. Opt. Soc. Am. A, 32:5 (2015), 843  crossref  isi  scopus
    3. A. B. Sotskii, S. O. Parashkov, PFMT, 2015, no. 2(23), 18–28  mathnet
    4. A. B. Sotsky, L. M. Steingart, J. H. Jackson, S. O. Parashkov, I. S. Dzen, Tech. Phys, 60:8 (2015), 1220  crossref  isi  elib  scopus
    5. Quantum Electron., 45:9 (2015), 868–872  mathnet  crossref  isi  elib
    6. V. M. Serdyuk, J. A. Titovitsky, DEVICES METHODS MEAS., 8:1 (2017), 55–60  crossref  isi
    7. M. A. Fakhri, E. T. Salim, M. H. A. Wahid, U. Hashim, Z. T. Salim, J. Mater. Sci.-Mater. Electron., 29:11 (2018), 9200–9208  crossref  isi  scopus
    8. A. V. Shulga, A. V. Khomchenko, I. V. Shilova, Tech. Phys. Lett., 44:11 (2018), 953–955  crossref  isi  scopus
    9. Sokolov V.I., Goriachuk I.O., Zavarzin I.V., Molchanova S.I., Pogodina Yu.E., Polunin E.V., Yarosch A.A., Russ. Chem. Bull., 68:3 (2019), 559–564  crossref  isi  scopus
    10. Serdyuk V.M., Rudnitsky A.S., J. Opt. Soc. Am. A-Opt. Image Sci. Vis., 36:9 (2019), 1573–1582  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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