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Kvantovaya Elektronika, 2015, Volume 45, Number 5, Pages 462–466 (Mi qe16177)  

This article is cited in 3 scientific papers (total in 3 papers)

Extreme light fields and their applications

Specific features of single-pulse femtosecond laser micron and submicron ablation of a thin silver film coated with a micron-thick photoresist layer

D. A. Zayarnyia, A. A. Ionina, S. I. Kudryashovab, S. V. Makarovac, A. A. Rudenkoa, E. A. Drozdovad, S. B. Odinokovd

a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
b National Engineering Physics Institute "MEPhI", Moscow
c St. Petersburg State University of Information Technologies, Mechanics and Optics
d Bauman Moscow State Technical University

Abstract: Specific features of ablation of a thin silver film with a 1-$\mu$m-thick layer of a highly transparent photoresist and the same film without a photoresist layer under single tightly focused femtosecond laser pulses in the visible range (515 nm) are experimentally investigated. Interference effects of internal modification of the photoresist layer, its spallation ablation from the film surface and formation of through hollow submicron channels in the resist without its spallation but with ablation of the silver film lying under the resist are found and discussed.

Keywords: thin silver film with a micron-thick layer of a transparent photoresist, femtosecond laser pulses in the visible range, tight focusing, submicron and micron ablation.
Author to whom correspondence should be addressed

Full text: PDF file (3065 kB)
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English version:
Quantum Electronics, 2015, 45:5, 462–466

Bibliographic databases:

PACS: 79.20.Eb, 81.15.-z, 42.65.Re
Received: 22.02.2015

Citation: D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, E. A. Drozdova, S. B. Odinokov, “Specific features of single-pulse femtosecond laser micron and submicron ablation of a thin silver film coated with a micron-thick photoresist layer”, Kvantovaya Elektronika, 45:5 (2015), 462–466 [Quantum Electron., 45:5 (2015), 462–466]

Citation in format AMSBIB
\Bibitem{ZayIonKud15}
\by D.~A.~Zayarnyi, A.~A.~Ionin, S.~I.~Kudryashov, S.~V.~Makarov, A.~A.~Rudenko, E.~A.~Drozdova, S.~B.~Odinokov
\paper Specific features of single-pulse femtosecond laser micron and submicron ablation of a thin silver film coated with a micron-thick photoresist layer
\jour Kvantovaya Elektronika
\yr 2015
\vol 45
\issue 5
\pages 462--466
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\transl
\jour Quantum Electron.
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\vol 45
\issue 5
\pages 462--466
\crossref{https://doi.org/10.1070/QE2015v045n05ABEH015788}
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\scopus{http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-84930064628}


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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. M. Feinaeugle, P. Gregorcic, D. J. Heath, B. Mills, R. W. Eason, Appl. Surf. Sci., 396 (2017), 1231–1238  crossref  isi  elib  scopus
    2. A. K. Ivanova, A. A. Ionin, R. A. Khmel'nitskii, Yu. K. Klevkov, S. I. Kudryashov, A. O. Levchenko, N. N. Mel'nik, A. A. Nastulyavichus, A. A. Rudenko, I. N. Saraeva, N. A. Smirnov, D. A. Zayarny, S. A. Gonchukov, E. R. Tolordava, A. N. Baranov, Proceedings of International Conference on Metamaterials and Nanophotonics (Metanano-2017), AIP Conf. Proc., 1874, Amer. Inst. Phys., 2017, UNSP 040013  crossref  isi  scopus
    3. A. Ionin, A. Ivanova, R. Khmel'nitskii, Yu. Klevkov, S. Kudryashov, N. Mel'nik, A. Nastulyavichus, A. Rudenko, I. Saraeva, N. Smirnov, D. Zayarny, A. Baranov, D. Kirilenko, P. Brunkov, A. Shakhmin, Appl. Surf. Sci., 436 (2018), 662–669  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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