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Kvantovaya Elektronika, 2015, Volume 45, Number 8, Pages 725–730 (Mi qe16215)  

This article is cited in 6 scientific papers (total in 6 papers)

Interaction of laser radiation with matter

Femtosecond-laser fabrication of cyclic structures in the bulk of transparent dielectrics

S. K. Vartapetov, D. V. Ganin*, K. E. Lapshin, A. Z. Obidin

Physics Instrumentation Center, A. M. Prokhorov General Physics Institute, Troitsk, Moscow region

Abstract: We report the results of the experiments on developing precision micromachining technology, obtained under the conditions of focusing the pulses of a femtosecond (FS) laser into the volume of a transparent material, which is important, particularly, in the processing of biomaterials in ophthalmology. The implementation conditions and some characteristic features of the special regime of micromachining are determined, when at a definite relation between the sample scanning velocity and the repetition rate of FS pulses the region, destroyed by the laser radiation, is shifted along the optical axis towards the objective and back, forming cyclic patterns inside the sample. It is supposed that the main causes of the damage region shift are the induced modification of the refractive index and the reduction of the damage threshold due to the change in the material density and structure in the microscopic domain, adjacent to the boundary of the cavity produced by the previous pulse. The results of the performed study with the above regime taken into account were used in the technology of precision cutting of crystals, glasses and polymers. The best quality of the cut surface is achieved under the conditions, eliminating the appearance of the cyclic regime. In the samples of polycarbonate, polymethyl methacrylate and fused silica the cylindrical cavities were obtained with the aspect ratio higher than 200, directed along the laser beam, and microcapillaries with the diameter 1–2 μm in the direction, perpendicular to this beam.

Keywords: femtosecond laser pulse, microstructures, filament, interaction of femtosecond radiation with transparent dielectrics, photodestruction, focusing into the bulk of material.
* Author to whom correspondence should be addressed

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English version:
Quantum Electronics, 2015, 45:8, 725–730

Bibliographic databases:

PACS: 79.20.Eb, 42.65.Jx, 42.65.Re
Received: 08.04.2014
Revised: 02.12.2014

Citation: S. K. Vartapetov, D. V. Ganin, K. E. Lapshin, A. Z. Obidin, “Femtosecond-laser fabrication of cyclic structures in the bulk of transparent dielectrics”, Kvantovaya Elektronika, 45:8 (2015), 725–730 [Quantum Electron., 45:8 (2015), 725–730]

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  • http://mi.mathnet.ru/eng/qe/v45/i8/p725

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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. Atezhev V.V., Barchunov B.V., Vartapetov S.K., Zav'yalov A.S., Lapshin K.E., Movshev V.G., Shcherbakov I.A., Laser Phys., 26:8, SI (2016), 084010  crossref  isi  elib  scopus
    2. Saerchen E., Wenzel J., Antonopoulos G., Krueger A., Lubatschowski H., Ripken T., SPIE BiOS (San Francisco, California, United States, Saturday 13 February 2016), SPIE Proceedings, 9706, ed. Jansen E., Spie-Int Soc Optical Engineering, 2016, 97060Q  crossref  isi  scopus
    3. Ganin D.V., Lapshin K.E., Obidin F.Z., Vartapetov S.K., 2016 International Conference Laser Optics (Lo), IEEE, 2016  isi
    4. D. Ganin, K. Lapshin, A. Obidin, S. Vartapetov, Appl. Phys. A-Mater. Sci. Process., 123:5 (2017), 378  crossref  isi  scopus
    5. B. Stepak, M. Gazinska, M. Nejbauer, Yu. Stepanenko, A. Antonczak, Sci Rep, 9 (2019), 3069  crossref  isi  scopus
    6. E. Saerchen, S. Liedtke-Gruener, M. Kopp, A. Heisterkamp, H. Lubatschowski, T. Ripken, PLoS One, 14:9 (2019), e0222293  crossref  isi  scopus
  • Квантовая электроника Quantum Electronics
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