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Kvantovaya Elektronika, 2015, Volume 45, Number 8, Pages 691–696 (Mi qe16225)  

This article is cited in 1 scientific paper (total in 1 paper)

Lasers

High-power, highly stable KrF laser with a 4-kHz pulse repetition rate

V. M. Borisov, A. V. El'tsov, O. B. Khristoforov

Troitsk Institute for Innovation and Fusion Research

Abstract: An electric-discharge KrF laser (248 nm) with an average output power of 300 W is developed and studied. A number of new design features are related to the use of a laser chamber based on an Al2O3 ceramic tube. A high power and pulse repetition rate are achieved by using a volume discharge with lateral preionisation by the UV radiation of a creeping discharge in the form of a homogeneous plasma sheet on the surface of a plane sapphire plate. Various generators for pumping the laser are studied. The maximum laser efficiency is 3.1%, the maximum laser energy is 160 mJ pulse-1, and the pulse duration at half maximum is 7.5 ns. In the case of long-term operation at a pulse repetition rate of 4 kHz and an output power of 300 W, high stability of laser output energy (σ≤0.7%) is achieved using an all-solid-state pump system.

Keywords: excimer laser, KrF, preionisation, creeping discharge, ceramic laser chamber, C–C scheme, LC inverter, solid state pump system, high pulse repetition rate.
Author to whom correspondence should be addressed

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English version:
Quantum Electronics, 2015, 45:8, 691–696

Bibliographic databases:

PACS: 42.55.Lt, 42.60.By, 42.60.Lh
Received: 21.08.2014
Revised: 30.10.2014

Citation: V. M. Borisov, A. V. El'tsov, O. B. Khristoforov, “High-power, highly stable KrF laser with a 4-kHz pulse repetition rate”, Kvantovaya Elektronika, 45:8 (2015), 691–696 [Quantum Electron., 45:8 (2015), 691–696]

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  • http://mi.mathnet.ru/eng/qe16225
  • http://mi.mathnet.ru/eng/qe/v45/i8/p691

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    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. Ershov Yu.A., Maklakov V.V., Khristoforov O.B., Theor. Found. Chem. Eng., 50:1 (2016), 76–82  crossref  isi  elib  scopus
  • Квантовая электроника Quantum Electronics
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