Kvantovaya Elektronika
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Impact factor
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS



Kvantovaya Elektronika:
Year:
Volume:
Issue:
Page:
Find






Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register


Kvantovaya Elektronika, 2017, Volume 47, Number 9, Pages 853–859 (Mi qe16671)  

This article is cited in 1 scientific paper (total in 1 paper)

VUV spectroscopy

Versatile and compact wide-range VUV spectrometer for quantitative measurements

A. P. Shevel'ko

P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow

Abstract: Main parameters of a new scheme of a compact VUV grazing incidence spectrometer based on a plane amplitude diffraction grating are considered. The spectrometer will allow simultaneous detection of spectra at the +1st order diffraction edge with a sufficiently high (λ/δλ ~150) spectral resolution and in the -1st order with a moderate resolution (λ/δλ ~15–30), but in a very wide (5–200 nm) spectral range. The use of such a spectrometer is promising for measuring the absolute radiation yield in these spectral regions, which is necessary for the diagnostics and control of plasma radiation sources, including those intended for projection EUV nanolithography.

Keywords: VUV spectroscopy and radiometry, plasma diagnostics, VUV spectrometers, EUV nanolithography.

Funding Agency Grant Number
Russian Foundation for Basic Research 02-15-04411


Full text: PDF file (932 kB)
References: PDF file   HTML file

English version:
Quantum Electronics, 2017, 47:9, 853–859

Bibliographic databases:

Received: 04.04.2017
Revised: 05.06.2017

Citation: A. P. Shevel'ko, “Versatile and compact wide-range VUV spectrometer for quantitative measurements”, Kvantovaya Elektronika, 47:9 (2017), 853–859 [Quantum Electron., 47:9 (2017), 853–859]

Linking options:
  • http://mi.mathnet.ru/eng/qe16671
  • http://mi.mathnet.ru/eng/qe/v47/i9/p853

    SHARE: VKontakte.ru FaceBook Twitter Mail.ru Livejournal Memori.ru


    Citing articles on Google Scholar: Russian citations, English citations
    Related articles on Google Scholar: Russian articles, English articles

    This publication is cited in the following articles:
    1. Quantum Electron., 49:9 (2019), 839–844  mathnet  crossref  isi  elib
  • Квантовая электроника Quantum Electronics
    Number of views:
    This page:153
    Full text:60
    References:17
    First page:14

     
    Contact us:
     Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2021