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Kvantovaya Elektronika, 2003, Volume 33, Number 1, Pages 3–6 (Mi qe2357)  

This article is cited in 5 scientific papers (total in 5 papers)

Special issue devoted to the 80th anniversary of academician N. G. Basov's birth

A capillary discharge plasma source of intense VUV radiation

I. I. Sobel'mana, A. P. Shevel'koa, O. F. Yakusheva, L. V. Knightb, R. S. Turleyb

a P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow
b Brigham Young University, USA

Abstract: The results of investigation of a capillary discharge plasma, used as a source of intense VUV radiation and soft X-rays, are presented. The plasma was generated during the discharge of low-inductance condensers in a gas-filled ceramic capillary. Intense line radiation was observed in a broad spectral range (30-400 Å) in various gases (CO2, Ne, Ar, Kr, Xe). The absolute radiation yield for the xenon discharge was ~5 mJ (2π sr)-1 pulse-1 within a spectral band of width 9 Å at 135 Å. Such a radiation source can be used for various practical applications, such as EUV projection lithography, microscopy of biological objects in a 'water window', reflectometry, etc.

Full text: PDF file (197 kB)

English version:
Quantum Electronics, 2003, 33:1, 3–6

Bibliographic databases:

PACS: 52.25.Os, 52.50.Nr, 42.72.Bj
Received: 17.06.2002

Citation: I. I. Sobel'man, A. P. Shevel'ko, O. F. Yakushev, L. V. Knight, R. S. Turley, “A capillary discharge plasma source of intense VUV radiation”, Kvantovaya Elektronika, 33:1 (2003), 3–6 [Quantum Electron., 33:1 (2003), 3–6]

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  • http://mi.mathnet.ru/eng/qe/v33/i1/p3

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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. A. P. Shevelko, D. E. Bliss, E. D. Kazakov, M. G. Mazarakis, J. S. McGurn, L. V. Knight, K. W. Struve, I. Yu. Tolstikhina, T. J. Weeks, Plasma Phys Rep, 34:11 (2008), 944  crossref  adsnasa  isi  elib  scopus
    2. V. I. Donin, Tech Phys Lett, 35:3 (2009), 228  crossref  mathscinet  adsnasa  isi  elib  scopus
    3. K. N. Mitrofanov, E. V. Grabovski, A. N. Gritsuk, Ya. N. Laukhin, V. V. Aleksandrov, G. M. Oleinik, S. F. Medovshchikov, A. P. Shevel’ko, Plasma Phys. Rep, 39:1 (2013), 62  crossref  adsnasa  isi  elib  scopus
    4. M Müller, L Schroedter, T Oelze, L Nösel, A Przystawik, J. Phys. B: At. Mol. Opt. Phys, 48:17 (2015), 174002  crossref  isi  scopus
    5. Sasorov P.V., X-Ray Lasers 2016, Springer Proceedings in Physics, 202, eds. Kawachi T., Bulanov S., Daido H., Kato Y., Springer-Verlag Berlin, 2018, 45–51  crossref  isi  scopus
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