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Kvantovaya Elektronika, 1991, Volume 18, Number 2, Pages 183–185 (Mi qe3742)  

Lasers

Pulse-periodic 600-W XeCl laser for industrial applications

V. M. Borisov, A. Yu. Vinokhodov, S. M. Gerasimov, E. V. Evstratov, Yu. B. Kiryukhin, S. G. Kuznetsov, Yu. Yu. Stepanov, V. A. Vizir', V. I. Manylov, S. P. Nosenko, S. P. Sychev, V. V. Chervyakov, N. G. Shubkin


Abstract: The results are given of the construction of a high-power excimer laser capable of generating λ = 308-nm radiation with an average power of ~ 600 W. The laser power supply system was based on four commercial thyratrons and a magnetic switch. As an example of an application of such a laser, the results are given of the formation of a structure of apertures in polyimide deposited on aluminum. A binary film of this type serves as a flexible substrate used to mount large-scale integrated circuits.

Full text: PDF file (838 kB)

English version:
Soviet Journal of Quantum Electronics, 1991, 21:2, 162–164

Bibliographic databases:

UDC: 621.373.826.038.823
PACS: 42.55.Lt, 42.62.Cf, 42.60.By, 42.79.Ag, 42.60.Jf
Received: 02.10.1990

Citation: V. M. Borisov, A. Yu. Vinokhodov, S. M. Gerasimov, E. V. Evstratov, Yu. B. Kiryukhin, S. G. Kuznetsov, Yu. Yu. Stepanov, V. A. Vizir', V. I. Manylov, S. P. Nosenko, S. P. Sychev, V. V. Chervyakov, N. G. Shubkin, “Pulse-periodic 600-W XeCl laser for industrial applications”, Kvantovaya Elektronika, 18:2 (1991), 183–185 [Sov J Quantum Electron, 21:2 (1991), 162–164]

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  • Квантовая электроника Quantum Electronics
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