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Kvantovaya Elektronika, 1996, Volume 23, Number 4, Pages 368–369 (Mi qe671)  

Laser applications and other topics in quantum electronics

Formation of the image of a microstep profile in a heterodyne differential-phase microscope

D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky

A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

Abstract: A theory of the formation of images of microscopic objects of arbitrary shape in a laser heterodyne differential-phase microscope is developed. This theory is used to propose a method for measuring the parameters of step-like microscopic objects with ultrahigh resolution. The experimental results show that this method can be used to analyse deep (h > λ) amplitude—phase steps with the lateral definition better than 0.1 μm.

Full text: PDF file (209 kB)

English version:
Quantum Electronics, 1996, 26:4, 360–364

Bibliographic databases:

PACS: 07.60.Pb, 42.30.Va, 42.62.Eh
Received: 01.01.1996

Citation: D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky, “Formation of the image of a microstep profile in a heterodyne differential-phase microscope”, Kvantovaya Elektronika, 23:4 (1996), 368–369 [Quantum Electron., 26:4 (1996), 360–364]

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