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Kvantovaya Elektronika, 1996, Volume 23, Number 7, Pages 637–641 (Mi qe739)  

This article is cited in 3 scientific papers (total in 3 papers)

Interaction of laser radiation with matter. Laser plasma

Laser-assisted etching of the surface of polycrystalline silicon carbide by copper-vapour laser radiation

V. V. Voronov, S. I. Dolgaev, A. A. Lyalin, G. A. Shafeev

A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

Abstract: An investigation was made of laser-assisted (by radiation from a copper vapour laser) etching of polycrystalline silicon carbide in air and in liquid media (water, dimethyl sulfoxide). The maximum etching rate of ceramic SiC in air reached 0.24 μm pulse–1 and in dimethyl sulfoxide it was 0.07 μm pulse–1 when the energy density was 16 J cm–2 in both cases. Scanning electron microscopy and x-ray structure analysis were used to study changes in the morphology and chemical composition of the etched surface of SiC. Etching in air produced partly amorphised silicon carbide and microcrystals of free Si with a characteristic size of about 30 nm. The surface of silicon carbide subjected to laser-assisted etching was capable of chemical reduction of copper from a solution used for chemical metallisation. Copper coatings formed in this way adhered strongly to the surface (adhesion force up to 30 N mm–2).

Full text: PDF file (213 kB)

English version:
Quantum Electronics, 1996, 26:7, 621–625

Bibliographic databases:

PACS: 81.65.Cf, 42.62.Cf
Received: 01.01.1996

Citation: V. V. Voronov, S. I. Dolgaev, A. A. Lyalin, G. A. Shafeev, “Laser-assisted etching of the surface of polycrystalline silicon carbide by copper-vapour laser radiation”, Kvantovaya Elektronika, 23:7 (1996), 637–641 [Quantum Electron., 26:7 (1996), 621–625]

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  • http://mi.mathnet.ru/eng/qe/v23/i7/p637

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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. Ahmed N., Darwish S., Alahmari A.M., Mater. Manuf. Process., 31:9 (2016), 1121–1142  crossref  isi  elib  scopus
    2. Alahmari A.M., Ahmed N., Darwish S., Int. J. Adv. Manuf. Technol., 83:9-12 (2016), 1671–1681  crossref  isi  scopus
    3. Darwish Saied Muhammed Hassan Ahmed N. Al-Ahmari A.M., Laser Beam Micro-Milling of Micro-Channels in Aerospace Alloys, Advanced Structured Materials, 68, ed. Darwish S. Ahmed N. AlAhmari A., Springer-Verlag Singapore Pte Ltd, 2017, 1+  crossref  isi  scopus
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