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TVT, 1989, Volume 27, Issue 6, Pages 1185–1189 (Mi tvt4102)  

Methods of Experimental Investigation and Measurements

Synthesis of thin-films of aluminum nitride

A. V. Kirillin, A. V. Kostanovskii, L. A. Zhylyakov

Institute for High Temperatures, USSR Academy of Sciences, Moscow

Full text: PDF file (371 kB)

English version:
High Temperature, 1989, 27:6, 948–952

Bibliographic databases:
UDC: 546.621.171.1:539.216
Received: 22.12.1988

Citation: A. V. Kirillin, A. V. Kostanovskii, L. A. Zhylyakov, “Synthesis of thin-films of aluminum nitride”, TVT, 27:6 (1989), 1185–1189; High Temperature, 27:6 (1989), 948–952

Citation in format AMSBIB
\Bibitem{KirKosZhy89}
\by A.~V.~Kirillin, A.~V.~Kostanovskii, L.~A.~Zhylyakov
\paper Synthesis of thin-films of aluminum nitride
\jour TVT
\yr 1989
\vol 27
\issue 6
\pages 1185--1189
\mathnet{http://mi.mathnet.ru/tvt4102}
\transl
\jour High Temperature
\yr 1989
\vol 27
\issue 6
\pages 948--952
\isi{http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&DestLinkType=FullRecord&DestApp=ALL_WOS&KeyUT=A1989DY47000022}


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  • http://mi.mathnet.ru/eng/tvt/v27/i6/p1185

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