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UFN, 2003, Volume 173, Number 6, Pages 609–648 (Mi ufn2143)  

This article is cited in 75 scientific papers (total in 75 papers)

REVIEWS OF TOPICAL PROBLEMS

Generation of cluster beams

B. M. Smirnov

Institute for High Temperatures, Russian Academy of Sciences

Abstract: The processes are considered in a cluster plasma consisting of a dense plasma of a buffer gas and a metal admixture. These processes involving clusters in a gas or plasma include nucleation processes in a supersaturated vapor, formation of metallic clusters in a dense gas from metal-containing compounds, and chemical processes in the course of this conversion, processes of cluster charging in a plasma and under the action of an electron beam. The basic methods are analyzed for cluster generation including formation and growth of clusters in free jet expansion of a gas, under laser action on the metallic surface, and growth of clusters in a plasma resulted from injection of metal-containing molecules into a plasma. Some applications of cluster beams are discussed, which include fabrication of thin films, new materials, and creation of a hot nonuniform plasma.

DOI: https://doi.org/10.3367/UFNr.0173.200306b.0609

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English version:
Physics–Uspekhi, 2003, 46:6, 589–628

Bibliographic databases:

PACS: 36.40.Sx, 36.40.Wa, 52.50.Jm, 61.46.+w
Received: December 15, 2002
Revised: April 17, 2003

Citation: B. M. Smirnov, “Generation of cluster beams”, UFN, 173:6 (2003), 609–648; Phys. Usp., 46:6 (2003), 589–628

Citation in format AMSBIB
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\by B.~M.~Smirnov
\paper Generation of cluster beams
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\vol 173
\issue 6
\pages 609--648
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\crossref{https://doi.org/10.3367/UFNr.0173.200306b.0609}
\transl
\jour Phys. Usp.
\yr 2003
\vol 46
\issue 6
\pages 589--628
\crossref{https://doi.org/10.1070/PU2003v046n06ABEH001381}
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