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Num. Meth. Prog., 2019, Volume 20, Issue 4, Pages 471–480 (Mi vmp982)  

This article is cited in 1 scientific paper (total in 1 paper)

A nonlocal algorithm for analyzing the data of monochromatic optical control in the process of multilayer coating deposition

I. V. Kochikova, Yu. S. Lagutinb, A. A. Lagutinab, D. V. Lukyanenkob, A. V. Tikhonravova, A. G. Yagolab

a Lomonosov Moscow State University, Research Computing Center
b Faculty of Physics, Lomonosov Moscow State University

Abstract: A new algorithm for determining the extrema in the dependence of the reflection coefficient on the optical thickness of the deposited layer is proposed. This reflection coefficient is measured during the deposition process of a multilayer coating. The proposed algorithm uses a physical model of the deposition process, which makes it possible to use all the measurement data accumulated by a recording device during the deposition of the layer in contrast to the classical approaches that adequately describe the dependence of the reflection coefficient only near its extremum. The efficiency of the proposed approach is shown by an example of modeling the deposition process for a 20-layer quarter-wave mirror.

Keywords: numerical algorithms, experimental data analysis, thin film coatings, monochromatic optical control.

DOI: https://doi.org/10.26089/NumMet.v20r441

Full text: PDF file (488 kB)

UDC: 519.6
Received: 07.10.2019

Citation: I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “A nonlocal algorithm for analyzing the data of monochromatic optical control in the process of multilayer coating deposition”, Num. Meth. Prog., 20:4 (2019), 471–480

Citation in format AMSBIB
\Bibitem{KocLagLag19}
\by I.~V.~Kochikov, Yu.~S.~Lagutin, A.~A.~Lagutina, D.~V.~Lukyanenko, A.~V.~Tikhonravov, A.~G.~Yagola
\paper A nonlocal algorithm for analyzing the data of monochromatic optical control in the process of multilayer coating deposition
\jour Num. Meth. Prog.
\yr 2019
\vol 20
\issue 4
\pages 471--480
\mathnet{http://mi.mathnet.ru/vmp982}
\crossref{https://doi.org/10.26089/NumMet.v20r441}


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    Citing articles on Google Scholar: Russian citations, English citations
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    This publication is cited in the following articles:
    1. I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis”, J. Appl. Industr. Math., 14:2 (2020), 329–338  mathnet  crossref  crossref  elib
  • Numerical methods and programming
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