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Kolpakov, Vsevolod Anatolyevich

Statistics Math-Net.Ru
Total publications: 2
Scientific articles: 2

Number of views:
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References:31
Professor
Candidate of physico-mathematical sciences
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Biography

Associate professor of Samara National Research University. Areas of research: ion-plasma materials processing technologies, technological processes in microand nano-electronics, diffractive optics.


http://www.mathnet.ru/eng/person123569
List of publications on Google Scholar
List of publications on ZentralBlatt

Publications in Math-Net.Ru
2016
1. N. A. Ivliev, V. A. Kolpakov, S. V. Krichevskiy, “Determination of organic contaminant concentration on the silica surface by lateral force microscopy”, Computer Optics, 40:6 (2016),  837–843  mathnet
2. V. V. Podlipnov, V. A. Kolpakov, N. L. Kazanskii, “Etching of silicon dioxide in off-electrode plasma using a chrome mask”, Computer Optics, 40:6 (2016),  830–836  mathnet

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