Publications in Math-Net.Ru |
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2019 |
1. |
D. B. Abramenko, P. S. Antsiferov, D. I. Astakhov, A. Yu. Vinokhodov, I. Yu. Vichev, R. R. Gayazov, A. S. Grushin, L. A. Dorokhin, V. V. Ivanov, D. A. Kim, K. N. Koshelev, P. V. Krainov, M. S. Krivokorytov, V. M. Krivtsun, B. V. Lakatosh, A. A. Lash, V. V. Medvedev, A. N. Ryabtsev, Yu. V. Sidelnikov, E. P. Snegirev, A. D. Solomyannaya, M. V. Spiridonov, I. P. Tsygvintsev, O. F. Yakushev, A. A. Yakushkin, “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences)”, UFN, 189:3 (2019), 323–334 ; Phys. Usp., 62:3 (2019), 304–314 |
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2016 |
2. |
A. Yu. Vinokhodov, M. S. Krivokorytov, Yu. V. Sidelnikov, V. M. Krivtsun, V. V. Medvedev, K. N. Koshelev, “High brightness EUV sources based on laser plasma at using droplet liquid metal target”, Kvantovaya Elektronika, 46:5 (2016), 473–480 [Quantum Electron., 46:5 (2016), 473–480 ] |
3. |
A. Yu. Vinokhodov, V. M. Krivtsun, A. A. Lash, V. M. Borisov, O. F. Yakushev, K. N. Koshelev, “High-brightness laser-induced EUV source based on tin plasma with an unlimited lifetime of electrodes”, Kvantovaya Elektronika, 46:1 (2016), 81–87 [Quantum Electron., 46:1 (2016), 81–87 ] |
4. |
A. Yu. Vinokhodov, K. N. Koshelev, V. M. Krivtsun, M. S. Krivokorytov, Yu. V. Sidelnikov, V. V. Medvedev, V. O. Kompanets, A. A. Melnikov, S. V. Chekalin, “Formation of a fine-dispersed liquid-metal target under the action of femto- and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range”, Kvantovaya Elektronika, 46:1 (2016), 23–28 [Quantum Electron., 46:1 (2016), 23–28 ] |
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2013 |
5. |
E. P. Ivanova, A. Yu. Vinokhodov, “32.8-nm X-ray laser produced in a krypton cluster jet”, Kvantovaya Elektronika, 43:12 (2013), 1099–1106 [Quantum Electron., 43:12 (2013), 1099–1106 ] |
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2010 |
6. |
V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, S. V. Zakharov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “High-power EUV (13.5 nm) light source”, Kvantovaya Elektronika, 40:8 (2010), 720–726 [Quantum Electron., 40:8 (2010), 720–726 ] |
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2009 |
7. |
V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits”, Kvantovaya Elektronika, 39:10 (2009), 967–972 [Quantum Electron., 39:10 (2009), 967–972 ] |
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2000 |
8. |
V. M. Borisov, A. Yu. Vinokhodov, V. A. Vodchits, A. V. El'tsov, “On ultimate pulse repetition rates of an XeF laser”, Kvantovaya Elektronika, 30:10 (2000), 881–883 [Quantum Electron., 30:10 (2000), 881–883 ] |
9. |
V. M. Borisov, A. Yu. Vinokhodov, V. A. Vodchits, A. V. El'tsov, A. S. Ivanov, “Development of high-power KrF lasers with a pulse repetition rate up to 5 kHz”, Kvantovaya Elektronika, 30:9 (2000), 783–786 [Quantum Electron., 30:9 (2000), 783–786 ] |
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1998 |
10. |
V. M. Borisov, A. Yu. Vinokhodov, V. A. Vodchits, A. V. El'tsov, D. Basting, U. Stamm, F. Voss, “Operational stability of a compact 600-W KrF laser”, Kvantovaya Elektronika, 25:2 (1998), 131–134 [Quantum Electron., 28:2 (1998), 123–126 ] |
11. |
V. M. Borisov, A. Yu. Vinokhodov, V. A. Vodchits, A. I. Demin, A. V. El'tsov, D. Basting, U. Stamm, F. Voss, “Compact 600-W KrF laser”, Kvantovaya Elektronika, 25:2 (1998), 126–130 [Quantum Electron., 28:2 (1998), 119–122 ] |
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1995 |
12. |
V. M. Borisov, I. E. Bragin, A. Yu. Vinokhodov, V. A. Vodchits, “Pumping rate of electric-discharge excimer lasers”, Kvantovaya Elektronika, 22:6 (1995), 533–536 [Quantum Electron., 25:6 (1995), 507–510 ] |
13. |
V. M. Borisov, A. V. Borisov, I. E. Bragin, A. Yu. Vinokhodov, “Effects limiting the average power of compact pulse-periodic KrF lasers”, Kvantovaya Elektronika, 22:5 (1995), 446–450 [Quantum Electron., 25:5 (1995), 421–425 ] |
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1991 |
14. |
V. M. Borisov, A. Yu. Vinokhodov, S. M. Gerasimov, E. V. Evstratov, Yu. B. Kiryukhin, S. G. Kuznetsov, Yu. Yu. Stepanov, V. A. Vizir', V. I. Manylov, S. P. Nosenko, S. P. Sychev, V. V. Chervyakov, N. G. Shubkin, “Pulse-periodic 600-W XeCl laser for industrial applications”, Kvantovaya Elektronika, 18:2 (1991), 183–185 [Sov J Quantum Electron, 21:2 (1991), 162–164 ] |
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1990 |
15. |
V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, S. G. Kuznetsov, D. N. Molchanov, A. N. Morozov, O. B. Khristoforov, “Pulse-periodic electric discharge XeCl laser”, Kvantovaya Elektronika, 17:2 (1990), 164–165 [Sov J Quantum Electron, 20:2 (1990), 123–124 ] |
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1988 |
16. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, D. V. Vlasov, Yu. B. Kiryukhin, D. N. Molchanov, V. P. Novikov, M. I. Persiantsev, I. V. Fedorov, “Conversion of λ = 308 nm radiation at pulse repetition frequencies up to 600 Hz by stimulated Raman scattering in compressed hydrogen”, Kvantovaya Elektronika, 15:10 (1988), 2030–2037 [Sov J Quantum Electron, 18:10 (1988), 1272–1277 ] |
17. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, D. N. Molchanov, V. P. Novikov, O. B. Khristoforov, “Divergence of radiation from an electric-discharge XeCl laser operating in the pulse-periodic regime”, Kvantovaya Elektronika, 15:9 (1988), 1712–1719 [Sov J Quantum Electron, 18:9 (1988), 1065–1070 ] |
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1987 |
18. |
V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, A. N. Morozov, “Wide-aperture electric discharge system with ultraviolet preionization for a pulse-periodic XeCl laser”, Kvantovaya Elektronika, 14:11 (1987), 2168–2174 [Sov J Quantum Electron, 17:11 (1987), 1381–1385 ] |
19. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, p. I. Vysikaylo, A. V. Gubarev, Yu. B. Kiryukhin, I. E. Krayushkin, S. A. Laptev, “Acoustic vibrations in the gas-discharge chamber of a fast-flow pulse-periodic laser”, Kvantovaya Elektronika, 14:6 (1987), 1206–1212 [Sov J Quantum Electron, 17:6 (1987), 766–770 ] |
20. |
V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, “Output energy evolution effects in a pulse-periodic XeCl excimer laser with an average power of 400 W”, Kvantovaya Elektronika, 14:5 (1987), 936–942 [Sov J Quantum Electron, 17:5 (1987), 595–598 ] |
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1986 |
21. |
R. V. Arutyunyan, V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, A. N. Morozov, “Electrode effects in a pulse-periodic excimer laser”, Kvantovaya Elektronika, 13:12 (1986), 2403–2407 [Sov J Quantum Electron, 16:12 (1986), 1589–1592 ] |
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1985 |
22. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, Yu. Yu. Stepanov, “Stimulated Raman scattering of radiation from an electric-discharge pulse-periodic XeCI laser in compressed H<sub>2</sub>”, Kvantovaya Elektronika, 12:5 (1985), 1100–1102 [Sov J Quantum Electron, 15:5 (1985), 727–729 ] |
23. |
R. V. Arutyunyan, V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, Yu. B. Kiryukhin, “Influence of electrode processes on the constriction of a volume discharge in pulse-periodic lasers”, Kvantovaya Elektronika, 12:5 (1985), 971–977 [Sov J Quantum Electron, 15:5 (1985), 639–642 ] |
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1984 |
24. |
V. M. Borisov, p. I. Vysikaylo, A. Yu. Vinokhodov, Yu. B. Kiryukhin, “Establishment of a steady-state power level in a pulse-periodic excimer laser”, Kvantovaya Elektronika, 11:10 (1984), 2069–2073 [Sov J Quantum Electron, 14:10 (1984), 1383–1384 ] |
25. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, p. I. Vysikaylo, Yu. B. Kiryukhin, “Increase in the repetition frequency of XeCl laser pulses to 1 kHz”, Kvantovaya Elektronika, 11:4 (1984), 827–829 [Sov J Quantum Electron, 14:4 (1984), 558–560 ] |
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1983 |
26. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, p. I. Vysikaylo, Yu. B. Kiryukhin, “Reasons for the fall in the output power of a pulse-periodic XeCl laser during its operation”, Kvantovaya Elektronika, 10:11 (1983), 2336–2340 [Sov J Quantum Electron, 13:11 (1983), 1518–1521 ] |
27. |
V. Yu. Baranov, V. M. Borisov, A. Yu. Vinokhodov, p. I. Vysikaylo, Yu. B. Kiryukhin, “Characteristics of the pulse-periodic regime of excimer lasers”, Kvantovaya Elektronika, 10:3 (1983), 540–546 [Sov J Quantum Electron, 13:3 (1983), 318–322 ] |
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