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Doklady Akademii Nauk SSSR, 1969, Volume 189, Number 2, Pages 302–304 (Mi dan35026)  
PHYSICS

Target sputtering as dependent on the incidence angle of the bombarding particles

O. B. Firsov
Full-text PDF (462 kB)
Presented: M. A. Leontovich
Received: 20.03.1969
Document Type: Article
UDC: 537-334.8
Language: Russian
Citation: O. B. Firsov, “Target sputtering as dependent on the incidence angle of the bombarding particles”, Dokl. Akad. Nauk SSSR, 189:2 (1969), 302–304
Citation in format AMSBIB
\Bibitem{Fir69}
\by O.~B.~Firsov
\paper Target sputtering as dependent on the incidence angle of the bombarding particles
\jour Dokl. Akad. Nauk SSSR
\yr 1969
\vol 189
\issue 2
\pages 302--304
\mathnet{http://mi.mathnet.ru/dan35026}
Linking options:
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  • https://www.mathnet.ru/eng/dan/v189/i2/p302
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