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PHYSICS
Target sputtering as dependent on the incidence angle of the bombarding particles
O. B. Firsov
Citation:
O. B. Firsov, “Target sputtering as dependent on the incidence angle of the bombarding particles”, Dokl. Akad. Nauk SSSR, 189:2 (1969), 302–304
Linking options:
https://www.mathnet.ru/eng/dan35026 https://www.mathnet.ru/eng/dan/v189/i2/p302
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| Statistics & downloads: |
| Abstract page: | 169 | | Full-text PDF : | 81 | | References: | 5 |
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