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Doklady Akademii Nauk SSSR, 1973, Volume 213, Number 1, Pages 74–76 (Mi dan37907)  
PHYSICS

On the theory of atomic displacement during ion implantation

V. V. Yudin
Full-text PDF (398 kB)
Presented: L. A. Artsimovich
Received: 01.02.1973
Document Type: Article
Language: Russian
Citation: V. V. Yudin, “On the theory of atomic displacement during ion implantation”, Dokl. Akad. Nauk SSSR, 213:1 (1973), 74–76
Citation in format AMSBIB
\Bibitem{Yud73}
\by V.~V.~Yudin
\paper On the theory of atomic displacement during ion implantation
\jour Dokl. Akad. Nauk SSSR
\yr 1973
\vol 213
\issue 1
\pages 74--76
\mathnet{http://mi.mathnet.ru/dan37907}
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