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Doklady Akademii Nauk SSSR, 1987, Volume 294, Number 6, Pages 1358–1362 (Mi dan47985)  
PHYSICS

Application of metal resinate films in electron- and photolithography

V. P. Ageev, I. V. Baranenkov, K. A. Valiev, L. V. Velikov, V. I. Konov, A. I. Maslakov, V. M. Melnikov, A. M. Prokhorov

General Physics Institute of the Academy of Sciences of the USSR, Moscow
Full-text PDF (961 kB)
Received: 03.03.1987
Document Type: Article
UDC: 621.382
Language: Russian
Citation: V. P. Ageev, I. V. Baranenkov, K. A. Valiev, L. V. Velikov, V. I. Konov, A. I. Maslakov, V. M. Melnikov, A. M. Prokhorov, “Application of metal resinate films in electron- and photolithography”, Dokl. Akad. Nauk SSSR, 294:6 (1987), 1358–1362
Citation in format AMSBIB
\Bibitem{AgeBarVal87}
\by V.~P.~Ageev, I.~V.~Baranenkov, K.~A.~Valiev, L.~V.~Velikov, V.~I.~Konov, A.~I.~Maslakov, V.~M.~Melnikov, A.~M.~Prokhorov
\paper Application of metal resinate films in electron- and photolithography
\jour Dokl. Akad. Nauk SSSR
\yr 1987
\vol 294
\issue 6
\pages 1358--1362
\mathnet{http://mi.mathnet.ru/dan47985}
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