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PHYSICS
Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy
Yu. V. Gulyaev, M. A. Kulakov, A. I. Morosov, E. I. Rau Institute of Radio Engineering and Electronics, Academy of Sciences of the USSR, Moscow
Received: 28.04.1987
Citation:
Yu. V. Gulyaev, M. A. Kulakov, A. I. Morosov, E. I. Rau, “Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy”, Dokl. Akad. Nauk SSSR, 301:4 (1988), 849–851
Linking options:
https://www.mathnet.ru/eng/dan48354 https://www.mathnet.ru/eng/dan/v301/i4/p849
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