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Fizika Tverdogo Tela, 2025, Volume 67, Issue 2, Pages 350–355
DOI: https://doi.org/10.61011/FTT.2025.02.59991.8-25
(Mi ftt11342)
 

Low dimensional systems

Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes

S. V. Bulyarskii, M. S. Molodenskii, P. E. L'vov, A. A. Pavlov, Yu. V. Anufriev, Yu. P. Shaman, G. G. Gusarov, K. A. Modestov, A. V. Sysa, A. R. Shevchenko

Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences
DOI: https://doi.org/10.61011/FTT.2025.02.59991.8-25
Abstract: The paper studies the effect of hydrogen flow on vapor-phase synthesis of carbon nanotubes in gas discharge plasma. Increasing the hydrogen flow in the reactor reduces the plasma temperature and increases the number of defects in the synthesized nanotubes. Analysis of the thermodynamics of synthesis shows that increasing the hydrogen concentration reduces the activity of the catalyst and reduces the amount of carbon supplied to the growing nanotube, which leads to an increase in the number of defects.
Keywords: carbon nanotubes, synthesis, defects.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation FFFG-2025-0002
Received: 10.01.2025
Revised: 10.01.2025
Accepted: 11.01.2025
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. V. Bulyarskii, M. S. Molodenskii, P. E. L'vov, A. A. Pavlov, Yu. V. Anufriev, Yu. P. Shaman, G. G. Gusarov, K. A. Modestov, A. V. Sysa, A. R. Shevchenko, “Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes”, Fizika Tverdogo Tela, 67:2 (2025), 350–355
Citation in format AMSBIB
\Bibitem{BulMolLvo25}
\by S.~V.~Bulyarskii, M.~S.~Molodenskii, P.~E.~L'vov, A.~A.~Pavlov, Yu.~V.~Anufriev, Yu.~P.~Shaman, G.~G.~Gusarov, K.~A.~Modestov, A.~V.~Sysa, A.~R.~Shevchenko
\paper Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes
\jour Fizika Tverdogo Tela
\yr 2025
\vol 67
\issue 2
\pages 350--355
\mathnet{http://mi.mathnet.ru/ftt11342}
\elib{https://elibrary.ru/item.asp?id=82415680}
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  • https://www.mathnet.ru/eng/ftt/v67/i2/p350
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