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Fizika Tverdogo Tela, 2025, Volume 67, Issue 2, Pages 350–355 DOI: https://doi.org/10.61011/FTT.2025.02.59991.8-25
(Mi ftt11342)
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Low dimensional systems
Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes
S. V. Bulyarskii, M. S. Molodenskii, P. E. L'vov, A. A. Pavlov, Yu. V. Anufriev, Yu. P. Shaman, G. G. Gusarov, K. A. Modestov, A. V. Sysa, A. R. Shevchenko Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences
DOI:
https://doi.org/10.61011/FTT.2025.02.59991.8-25
Abstract:
The paper studies the effect of hydrogen flow on vapor-phase synthesis of carbon nanotubes in gas discharge plasma. Increasing the hydrogen flow in the reactor reduces the plasma temperature and increases the number of defects in the synthesized nanotubes. Analysis of the thermodynamics of synthesis shows that increasing the hydrogen concentration reduces the activity of the catalyst and reduces the amount of carbon supplied to the growing nanotube, which leads to an increase in the number of defects.
Keywords:
carbon nanotubes, synthesis, defects.
Received: 10.01.2025 Revised: 10.01.2025 Accepted: 11.01.2025
Citation:
S. V. Bulyarskii, M. S. Molodenskii, P. E. L'vov, A. A. Pavlov, Yu. V. Anufriev, Yu. P. Shaman, G. G. Gusarov, K. A. Modestov, A. V. Sysa, A. R. Shevchenko, “Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes”, Fizika Tverdogo Tela, 67:2 (2025), 350–355
Linking options:
https://www.mathnet.ru/eng/ftt11342 https://www.mathnet.ru/eng/ftt/v67/i2/p350
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| Abstract page: | 57 | | Full-text PDF : | 21 |
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