Structural properties of barium strontium titanate films grown under different technological conditions

The structural properties of ferroelectric barium strontium titanate films with different compositions prepared under different deposition conditions have been investigated. It has been shown that the deposition temperature directly affects the phase and component compositions of the films, crystal lattice parameters, and crystallite sizes. At a deposition temperature of approximately 600$^\circ$C, impurity phases of strontium polytitanates are formed in addition to the barium strontium titanate phase. An increase in the deposition temperature to 880$^\circ$C leads to a barium deficiency as compared to the sputtering target. The deposition temperature providing a stoichiometric transfer of the component composition of the target into the barium strontium titanate film has been estimated.