Specific features of the formation of arrays of silver clusters from a thin film on a SiO$_2$ surface

The decomposition of thin silver films into clusters on a SiO$_2$ surface during thermal heating in vacuum has been studied. The experimental histograms of distribution of clusters formed from films of different thicknesses over their diameters have been constructed. It has been found that the decomposition of the films with thickness to 10 nm leads to the formation of monoclusters having one predominant diameter in the range from 15 to 20 nm. After a longer term annealing, the array of clusters almost does not change with time, and the predominant diameter is retained. From films with thicknesses ranging from 10 to 130 nm, an array of clusters with two predominant diameters containing monoclusters (40–80 nm) and globular clusters (400 nm) is formed. It is noted that, with increasing annealing time, the array is enlarged due to the coalescence process and is gradually evaporated; in this case, the predominant cluster diameters remain the same.