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Preprints of the Keldysh Institute of Applied Mathematics, 2007, 092, 11 pp. (Mi ipmp547)  
The automated facilities for measurement of the macrostresses in silicon details

M. V. Mezhenny, V. A. Grebennikov, E. B. Kulbatsky
Full-text PDF (215 kB)
URL: https://library.keldysh.ru/preprint.asp?id=2007-92&lg=r
Abstract: The present paper describes the way of macrostresses measurements by polarized-optical method based on application of electrooptic modulator–jack; description of automated facility for stresses measurements in monocrystalline materials transparent for short infra-red radiation and the examples of it’s application for control of micromechanical systems.
Document Type: Preprint
Language: Russian
Citation: M. V. Mezhenny, V. A. Grebennikov, E. B. Kulbatsky, “The automated facilities for measurement of the macrostresses in silicon details”, Keldysh Institute preprints, 2007, 092, 11 pp.
Citation in format AMSBIB
\Bibitem{MezGreKul07}
\by M.~V.~Mezhenny, V.~A.~Grebennikov, E.~B.~Kulbatsky
\paper The automated facilities for measurement of the macrostresses in silicon details
\jour Keldysh Institute preprints
\yr 2007
\papernumber 092
\totalpages 11
\mathnet{http://mi.mathnet.ru/ipmp547}
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    		Препринты Института прикладной математики им. М. В. Келдыша РАН
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