Y. M. Shirshov, A. V. Nabok, “DETERMINATION OF A PROFILE CAPTURED IN A CHARGE SILICON-NITRIDE”, Zhurnal Tekhnicheskoi Fiziki, 53:9 (1983), 1830

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Zhurnal Tekhnicheskoi Fiziki, 1983, Volume 53, Issue 9, Pages 1830–1833 (Mi jtf2551)

DETERMINATION OF A PROFILE CAPTURED IN A CHARGE SILICON-NITRIDE

Y. M. Shirshov, A. V. Nabok

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Document Type: Article

Language: Russian

Citation: Y. M. Shirshov, A. V. Nabok, “DETERMINATION OF A PROFILE CAPTURED IN A CHARGE SILICON-NITRIDE”, Zhurnal Tekhnicheskoi Fiziki, 53:9 (1983), 1830–1833

Citation in format AMSBIB

\Bibitem{1}

\by Y.~M.~Shirshov, A.~V.~Nabok

\paper DETERMINATION OF A PROFILE CAPTURED IN A CHARGE SILICON-NITRIDE

\jour Zhurnal Tekhnicheskoi Fiziki

\yr 1983

\vol 53

\issue 9

\pages 1830--1833

\mathnet{http://mi.mathnet.ru/jtf2551}

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https://www.mathnet.ru/eng/jtf/v53/i9/p1830

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