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Zhurnal Tekhnicheskoi Fiziki, 1992, Volume 62, Issue 4, Pages 162–170
(Mi jtf4637)
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Experimental Instruments and Techniques
PRINCIPLES OF GAAS(001) SPUTTERING BY AR+ IONS WITH 1-9 KEV ENERGY
N. A. Bert, K. Yu. Pogrebickii, I. P. Soshnikov, Y. N. Yurev
Citation:
N. A. Bert, K. Yu. Pogrebickii, I. P. Soshnikov, Y. N. Yurev, “PRINCIPLES OF GAAS(001) SPUTTERING BY AR+ IONS WITH 1-9 KEV ENERGY”, Zhurnal Tekhnicheskoi Fiziki, 62:4 (1992), 162–170
Linking options:
https://www.mathnet.ru/eng/jtf4637 https://www.mathnet.ru/eng/jtf/v62/i4/p162
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| Statistics & downloads: |
| Abstract page: | 105 | | Full-text PDF : | 53 |
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