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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 8, Pages 1224–1228
DOI: https://doi.org/10.21883/JTF.2018.08.46313.2234 (Mi jtf5845) 		 
This article is cited in 5 scientific papers (total in 5 papers)

Physics of nanostructures

Influence of annealing temperature on the microstructure and morphology of TiN films synthesized by dual magnetron sputtering

S. V. Zaitsev, V. S. Vashchilin, D. S. Prokhorenkov, M. V. Limarenko, E. I. Evtushenko

Belgorod Shukhov State Technological University
Full-text PDF (1459 kB) Citations (5)
DOI: https://doi.org/10.21883/JTF.2018.08.46313.2234
Abstract: TiN films synthesized on leucosapphire substrates by dual magnetron sputtering have been annealed in vacuum at 600, 700, 800, and 900$^{\circ}$C for 2 min. The microstructure and morphology of the films have been studied by X-ray diffraction and scanning electron microscopy at different temperatures. It has been found that annealing changes the microstructure, texture, grain size, and surface roughness of the TiN films.
Funding agency Grant number
Russian Foundation for Basic Research 14-41-08064 р_офи_м
Received: 03.03.2017
Revised: 13.02.2018
English version:
Technical Physics, 2018, Volume 63, Issue 8, Pages 1189–1193
DOI: https://doi.org/10.1134/S1063784218080236
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. V. Zaitsev, V. S. Vashchilin, D. S. Prokhorenkov, M. V. Limarenko, E. I. Evtushenko, “Influence of annealing temperature on the microstructure and morphology of TiN films synthesized by dual magnetron sputtering”, Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018), 1224–1228; Tech. Phys., 63:8 (2018), 1189–1193
Citation in format AMSBIB
\Bibitem{ZaiVasPro18}
\by S.~V.~Zaitsev, V.~S.~Vashchilin, D.~S.~Prokhorenkov, M.~V.~Limarenko, E.~I.~Evtushenko
\paper Influence of annealing temperature on the microstructure and morphology of TiN films synthesized by dual magnetron sputtering
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 8
\pages 1224--1228
\mathnet{http://mi.mathnet.ru/jtf5845}
\crossref{https://doi.org/10.21883/JTF.2018.08.46313.2234}
\elib{https://elibrary.ru/item.asp?id=35269884}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 8
\pages 1189--1193
\crossref{https://doi.org/10.1134/S1063784218080236}
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    • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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