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Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 4, Pages 101–105 (Mi jtf6585)  
This article is cited in 6 scientific papers (total in 6 papers)

Physics of nanostructures

Specific features of the laser irradiation of thin molybdenum films

A. V. Volkovab, N. L. Kazanskiiab, O. Yu. Moiseeva, V. D. Paraninb, S. D. Poletayevab, I. V. Chistyakovc

a Image Processing Systems Institute of the RAS, Samara, Russia
b Samara State Aerospace University (National Research University), Samara, Russia
c OOO Interlab, Moscow
Full-text PDF (439 kB) Citations (6)
URL: https://journals.ioffe.ru/jtf/2016/04/page-101.html.ru
Abstract: Laser irradiation of thin molybdenum films with a thickness of less than 100 nm is studied. An experimental hypothesis in accordance with which films of refractory metals can be laser-ablated owing to the formation of an intermediate oxide phase is experimentally proven. A threefold decrease in the thickness of the ablation region under the action of scanning laser radiation is interpreted.
Keywords: Laser Irradiation, Annealing Time, Refractory Metal, Ablation Zone, Laser Power Density.
Received: 02.03.2015
English version:
Technical Physics, 2016, Volume 61, Issue 4, Pages 579–583
DOI: https://doi.org/10.1134/S1063784216040241
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Volkov, N. L. Kazanskii, O. Yu. Moiseev, V. D. Paranin, S. D. Poletayev, I. V. Chistyakov, “Specific features of the laser irradiation of thin molybdenum films”, Zhurnal Tekhnicheskoi Fiziki, 86:4 (2016), 101–105; Tech. Phys., 61:4 (2016), 579–583
Citation in format AMSBIB
\Bibitem{VolKazMoi16}
\by A.~V.~Volkov, N.~L.~Kazanskii, O.~Yu.~Moiseev, V.~D.~Paranin, S.~D.~Poletayev, I.~V.~Chistyakov
\paper Specific features of the laser irradiation of thin molybdenum films
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 86
\issue 4
\pages 101--105
\mathnet{http://mi.mathnet.ru/jtf6585}
\elib{https://elibrary.ru/item.asp?id=25669394}
\transl
\jour Tech. Phys.
\yr 2016
\vol 61
\issue 4
\pages 579--583
\crossref{https://doi.org/10.1134/S1063784216040241}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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