Sputtering coefficient calculation during light atoms bombardment of the solid targets

A method for calculating the sputtering coefficient of targets during bombardment with light atoms is proposed. It is shown that taking into account the energy spectrum of reflected particles makes it possible to adequately describe the behavior of the sputtering coefficient near the threshold. At high energies, the particle reflection coefficient decreases greatly and the cascade sputtering mechanism proposed by Sigmund is added. Taking into account the contribution of both mechanisms makes it possible to achieve a quantitative description of the dependence of the sputtering coefficient in a wide range of energies of incident particles.