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XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Theoretical and Mathematical Physics
The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy
K. P. Gaikovich, I. V. Malyshev, D. G. Reunov, N. I. Chkhalo Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Abstract:
For soft X-ray microscopy in the approximation of geometrical optics, a theoretical model for the formation of the received image is constructed - a relationship is found between the image recorded on the detector and the 3$D$ distribution of the sample absorption index using a high-aperture mirror objective (NA > 0.3) with a focus depth close to the diffraction limit. The solution of the inverse problem of tomography for determining this 3$D$ distribution from the data of measurements in a high-aperture mirror SXR-microscope is obtained.
Keywords:
soft x-ray microscopy, inverse problem of microscopy, absorption contrast imaging.
Received: 02.05.2023 Revised: 02.05.2023 Accepted: 02.05.2023
Citation:
K. P. Gaikovich, I. V. Malyshev, D. G. Reunov, N. I. Chkhalo, “The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 867–879
Linking options:
https://www.mathnet.ru/eng/jtf7020 https://www.mathnet.ru/eng/jtf/v93/i7/p867
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