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Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 7, Pages 867–879
DOI: https://doi.org/10.21883/JTF.2023.07.55739.106-23
(Mi jtf7020)
 

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Theoretical and Mathematical Physics

The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy

K. P. Gaikovich, I. V. Malyshev, D. G. Reunov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Abstract: For soft X-ray microscopy in the approximation of geometrical optics, a theoretical model for the formation of the received image is constructed - a relationship is found between the image recorded on the detector and the 3$D$ distribution of the sample absorption index using a high-aperture mirror objective (NA > 0.3) with a focus depth close to the diffraction limit. The solution of the inverse problem of tomography for determining this 3$D$ distribution from the data of measurements in a high-aperture mirror SXR-microscope is obtained.
Keywords: soft x-ray microscopy, inverse problem of microscopy, absorption contrast imaging.
Funding agency Grant number
Russian Science Foundation 22-62-00068
The study was supported by a grant from the Russian Science Foundation (Project № 22-62-00068).
Received: 02.05.2023
Revised: 02.05.2023
Accepted: 02.05.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: K. P. Gaikovich, I. V. Malyshev, D. G. Reunov, N. I. Chkhalo, “The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 867–879
Citation in format AMSBIB
\Bibitem{GaiMalReu23}
\by K.~P.~Gaikovich, I.~V.~Malyshev, D.~G.~Reunov, N.~I.~Chkhalo
\paper The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 93
\issue 7
\pages 867--879
\mathnet{http://mi.mathnet.ru/jtf7020}
\crossref{https://doi.org/10.21883/JTF.2023.07.55739.106-23}
\elib{https://elibrary.ru/item.asp?id=54384483}
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