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Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 7, Pages 892–896
DOI: https://doi.org/10.21883/JTF.2023.07.55742.97-23 (Mi jtf7023) 		 
XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Plasma

Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets

A. Ya. Lopatina, V. I. Luchina, A. N. Nechaia, A. A. Perekalova, A. E. Pestova, N. N. Salashchenkoa, A. A. Solov'evb, N. N. Tsybina, N. I. Chkhaloa

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
b Institute of Applied Physics, Russian Academy of Sciences, 603950 Nizhny Novgorod, Russia
Full-text PDF (236 kB)
DOI: https://doi.org/10.21883/JTF.2023.07.55742.97-23
Abstract: The radiation spectra in the soft X-ray and extreme ultraviolet wavelength ranges of thin-film (0.15 $\mu$m) targets made of light materials (Si, C, Be) were studied when excited by a Nd:YAG laser pulse with a duration of 5.2 ns focused to an intensity of $\sim$10$^{12}$ W/cm$^2$. Line spectra of BeIII, BeIV, CV, and SiV ions were recorded using a spectrometer based on a multilayer X-ray mirror. A comparison with the spectra of bulk solid-state targets of the same materials is carried out. In all cases, there was a decrease in the intensity of the lines of the soft X-ray spectrum of film targets compared to monolithic ones; the decrease was, depending on the material, from several tens of percent to several times, with more than an order of magnitude less mass of the vaporized substance. Keywords:
Keywords: SXR and EUV radiation, thin films, laser plasma.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 075-15-2021-1361
The study was carried out with the financial support of the Ministry of Science and Higher Education of the Russian Federation (agreement № 075-15-2021-1361).
Received: 19.04.2023
Revised: 19.04.2023
Accepted: 19.04.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. Ya. Lopatin, V. I. Luchin, A. N. Nechai, A. A. Perekalov, A. E. Pestov, N. N. Salashchenko, A. A. Solov'ev, N. N. Tsybin, N. I. Chkhalo, “Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 892–896
Citation in format AMSBIB
\Bibitem{LopLucNec23}
\by A.~Ya.~Lopatin, V.~I.~Luchin, A.~N.~Nechai, A.~A.~Perekalov, A.~E.~Pestov, N.~N.~Salashchenko, A.~A.~Solov'ev, N.~N.~Tsybin, N.~I.~Chkhalo
\paper Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 93
\issue 7
\pages 892--896
\mathnet{http://mi.mathnet.ru/jtf7023}
\crossref{https://doi.org/10.21883/JTF.2023.07.55742.97-23}
\elib{https://elibrary.ru/item.asp?id=54384486}
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