Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm

Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7–30 nm have been calculated and synthesized. Three elements are implemented: for the range $\lambda$ = 7–12 nm – multilayer structure Mo/B4C (number of periods $N$ = 60, period thickness $d$ = 6.5 nm); for the range $\lambda$ = 11–18 nm – Mo/Be ($N$ = 50; $d$ = 9.83 nm) and for the range $\lambda$ = 17–30 nm – Be/Si/Al ($N$ = 40; $d$ = 18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15–1.0 nm.