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Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 7, Pages 1037–1045
DOI: https://doi.org/10.21883/JTF.2023.07.55766.107-23 (Mi jtf7047) 		 
XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Physical Electronics

The coating a liquid glass of the optical element substrates and its molecular composition

D. V. Petrovaab, M. S. Mikhailenkoa, M. V. Zorinaa, M. N. Drozdova, A. E. Pestova, N. I. Chkhaloa

a Institute for Physics of Microstructures, Russian Academy of Sciences, 607680 Nizhny Novgorod, Russia
b Lobachevsky State University, 603950 Nizhny Novgorod, Russia
Full-text PDF (993 kB)
DOI: https://doi.org/10.21883/JTF.2023.07.55766.107-23
Abstract: The article presents the results obtained by coating a liquid glass solution to the substrates of optical elements, followed by their etching with an ion beam. Particular attention is turned on the surface roughness of the optical element both after the deposition of liquid glass and after etching. A film of the applied glass composition was studied using secondary ion mass spectrometry (SIMS).
Keywords: liquid glass, films, surface roughness, polishing, ion etching, secondary ion mass spectrometry.
Funding agency Grant number
Russian Science Foundation 21-72-30029
The work was carried out with the financial support of the Russian Science Foundation grant № 21-72-30029.
Received: 02.05.2023
Revised: 02.05.2023
Accepted: 02.05.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. V. Petrova, M. S. Mikhailenko, M. V. Zorina, M. N. Drozdov, A. E. Pestov, N. I. Chkhalo, “The coating a liquid glass of the optical element substrates and its molecular composition”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1037–1045
Citation in format AMSBIB
\Bibitem{PetMikZor23}
\by D.~V.~Petrova, M.~S.~Mikhailenko, M.~V.~Zorina, M.~N.~Drozdov, A.~E.~Pestov, N.~I.~Chkhalo
\paper The coating a liquid glass of the optical element substrates and its molecular composition
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 93
\issue 7
\pages 1037--1045
\mathnet{http://mi.mathnet.ru/jtf7047}
\crossref{https://doi.org/10.21883/JTF.2023.07.55766.107-23}
\elib{https://elibrary.ru/item.asp?id=54384510}
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