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Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 7, Pages 1054–1058
DOI: https://doi.org/10.21883/JTF.2023.07.55769.67-23 (Mi jtf7050) 		 
XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Experimental instruments and technique

Application of transmission electron microscopy for the study of a functional nanoelement

K. E. Prikhod'koab, M. M. Dementyevaa

a National Research Centre "Kurchatov Institute", 123182 Moscow, Russia
b National Engineering Physics Institute "MEPhI", 115409 Moscow, Russia
Full-text PDF (622 kB)
DOI: https://doi.org/10.21883/JTF.2023.07.55769.67-23
Abstract: Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.
Keywords: Scanning transmission electron microscopy (STEM), high-resolution transmission electron microscopy (HRTEM), NbN thin superconducting films, cryogenic inductance element, electron energy loss spectroscopy (EELS)).
Received: 06.04.2023
Revised: 06.04.2023
Accepted: 06.04.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: K. E. Prikhod'ko, M. M. Dementyeva, “Application of transmission electron microscopy for the study of a functional nanoelement”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1054–1058
Citation in format AMSBIB
\Bibitem{PriDem23}
\by K.~E.~Prikhod'ko, M.~M.~Dementyeva
\paper Application of transmission electron microscopy for the study of a functional nanoelement
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 93
\issue 7
\pages 1054--1058
\mathnet{http://mi.mathnet.ru/jtf7050}
\crossref{https://doi.org/10.21883/JTF.2023.07.55769.67-23}
\elib{https://elibrary.ru/item.asp?id=54384513}
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