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Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 8, Pages 1121–1129
DOI: https://doi.org/10.21883/JTF.2023.08.55973.51-23
(Mi jtf7056)
 

Plasma

Characteristics of capacitive RF discharge in a magnetic field with a predominant radial component

G. V. Shvydkiy, I. I. Zadiriev, K. V. Vavilin, E. A. Kral'kina, A. M. Nikonov

Lomonosov Moscow State University, Moscow, Russia
Abstract: The work presents the results of an experimental study of the characteristics of the RF capacitive discharge placed in a magnetic field with a predominant radial component. The experiments are performed in the plasma source, which has the geometry of a Hall thruster. The integrated characteristics of the discharge, as well as the axial distribution of the probe ion current in the channel of the plasma source, are measured using three diagrams of the organization of the external discharge circuit: with the open for DC discharge circuit, as well as in the combination of a capacitive discharge with a direct current discharge. The main measurements are made in the argon in the flowrate range of 0.75–1.8 mg/s and the power of the generator 80–300 W at a frequencies of 2, 4 and 13.56 MHz, the induction of the magnetic field lying in the range of 100–300 G. Evaluation of the parameters of the plasma engine based on capacitive RF discharge when working in air, argon and krypton are made.
Keywords: capacitive radio -frequency discharge, VAC, displacement current, active current.
Funding agency Grant number
Russian Science Foundation 21-72-10090
This study was supported by grant of the Russian Science Foundation, project № 21-72-10090, https://rscf.ru/en/project/21-72-10090/.
Received: 24.03.2023
Revised: 16.05.2023
Accepted: 22.05.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: G. V. Shvydkiy, I. I. Zadiriev, K. V. Vavilin, E. A. Kral'kina, A. M. Nikonov, “Characteristics of capacitive RF discharge in a magnetic field with a predominant radial component”, Zhurnal Tekhnicheskoi Fiziki, 93:8 (2023), 1121–1129
Citation in format AMSBIB
\Bibitem{ShvZadVav23}
\by G.~V.~Shvydkiy, I.~I.~Zadiriev, K.~V.~Vavilin, E.~A.~Kral'kina, A.~M.~Nikonov
\paper Characteristics of capacitive RF discharge in a magnetic field with a predominant radial component
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 93
\issue 8
\pages 1121--1129
\mathnet{http://mi.mathnet.ru/jtf7056}
\crossref{https://doi.org/10.21883/JTF.2023.08.55973.51-23}
\elib{https://elibrary.ru/item.asp?id=54955548}
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