Investigation of the composition of samarium monosulfide films obtained by electron beam heating

The elemental composition of thin films obtained by electron beam heating of bulk SmS samples with a different element ratio: 1Sm : 1S, 1.05Sm : 1S and 1.15Sm : 1S. has been studied by energy dispersive spectroscopy. The analysis of elemental composition before and after spraying on the substrate was carried out on a volume sample of the composition 1.15Sm : 1S. According to the microanalysis data, a change in the content of elements was established and an assessment of the change in the phase composition in the sprayed material was made. It is shown that the composition of the obtained thin films contains an excessive Sm content. A method for determining the inhomogeneity of the composition in depth for SmS films is proposed, in which, using a two stream model of charged particle transport, the dependence of the electron beam path on the primary electron energy in SmS for energies up to 30 keV is calculated.